Apparatus, method and system for imaging and utilization of SEM charged particles

Chandler, David W.; Celio, Kimberlee Chiyoko

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Title: Apparatus, method and system for imaging and utilization of SEM charged particles

Abstract

A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.

Inventors:: Chandler, David W.; Celio, Kimberlee Chiyoko

Issue Date:: Tue Sep 08 00:00:00 EDT 2020

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1735243

Patent Number(s):: 10770262

Application Number:: 16/198,356

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/04735 - with electrostatic means
H01J2237/2443 - Scintillation detectors
H01J2237/2446 - Position sensitive detectors
H01J2237/24485 - Energy spectrometers
H01J2237/2449 - Detector devices with moving charges in electric or magnetic fields
H01J2237/24495 - Signal processing, e.g. mixing of two or more signals
H01J2237/24585 - Other variables, e.g. energy, mass, velocity, time, temperature
H01J37/06 - Electron sources
H01J37/12 - electrostatic
H01J37/20 - Means for supporting or positioning the objects or the material
H01J37/22 - Optical or photographic arrangements associated with the tube {
H01J37/244 - Detectors
H01J37/28 - with scanning beams

Show less

DOE Contract Number:: NA0003525

Resource Type:: Patent

Resource Relation:: Patent File Date: 11/21/2018

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; 47 OTHER INSTRUMENTATION

Citation Formats


                    Chandler, David W., and Celio, Kimberlee Chiyoko. Apparatus, method and system for imaging and utilization of SEM charged particles.  United States: N. p., 2020. 
        Web.

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                    Chandler, David W., & Celio, Kimberlee Chiyoko. Apparatus, method and system for imaging and utilization of SEM charged particles.  United States.

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                    Chandler, David W., and Celio, Kimberlee Chiyoko. Tue .  
        "Apparatus, method and system for imaging and utilization of SEM charged particles".  United States.  https://www.osti.gov/servlets/purl/1735243.

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@article{osti_1735243,

  title        = {Apparatus, method and system for imaging and utilization of SEM charged particles},

  author       = {Chandler, David W. and Celio, Kimberlee Chiyoko},

  abstractNote = {A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 08 00:00:00 EDT 2020},

  month        = {Tue Sep 08 00:00:00 EDT 2020}

}

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Works referenced in this record:

Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination
patent, May 2014

Mankos, Marian
US Patent Document 8,729,466
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8729466

Secondary Electron Optics and Detection Device
patent-application, June 2014

Lanio, Stefan; Frosien, Juergen; Schoenecker, Gerald
US Patent Application 13/734180; 20140175277
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140175277

Multi-beam ion/electron spectra-microscope
patent, May 2011

Khursheed, Anjam
US Patent Document 7,947,951
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7947951

High Throughput SEM Tool
patent-application, July 2011

Frosien, Juergen; Banzhof, Helmut; Adamec, Pavel
US Patent Application 12/528306; 20110163229
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110163229

Scanning Electron Microscope and Electron Trajectory Adjustment Method Therefor
patent-application, September 2017

Bizen, Daisuke; Morishita, Hideo; Hatano, Michio
US Patent Application 15/529281; 20170263415
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20170263415

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer
journal, May 1999

Jacka, M.; Kirk, M.; El Gomati, M. M.
Review of Scientific Instruments, Vol. 70, Issue 5
https://doi.org/10.1063/1.1149753

Electron beam apparatus
patent, June 2015

Ren, Weiming; Li, Shuai; Chen, Zhongwei
US Patent Document 9,048,063
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9048063

Retarding Potential Type Energy Analyzer
patent-application, March 2018

Muro, Takayuki; Matsushita, Tomohiro
US Patent Application 15/503342; 20180082829
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20180082829

Defect detection using energy spectrometer
patent, October 2007

Bertsche, Kirk J.
US Patent Document 7,276,694
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7276694

Energy Discriminating Electron Detector and Scanning Electron Microscope Using the Same
patent-application, October 2017

Sekiguchi, Takashi; Iwal, Hideo
US Patent Application 15/513231; 20170301512
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20170301512

Apparatus for Monitoring Process Chamber
patent-application, July 2017

Valdimir, Protopopov; Hwang, Ki Ho; Sung, Doug Yong
US Patent Application 15/260910; 20170213710
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20170213710

Method and apparatus for irradiating low-energy electrons
patent, August 1992

Yamazaki, Yuichiro; Miyoshi, Motosuke; Okumura, Katsuya
US Patent Document 5,138,169
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5138169

Charged Particle Beam Device
patent-application, May 2014

Sasaki, Yuko; Ito, Hiroyuki
US Patent Application 14/126792; 20140124666
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140124666

Scanning electron beam microscope
patent, May 2000

Masnaghetti, Douglas K.; Concina, Stefano E.; Sun, Stanley
US Patent Document 6,066,849
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6066849

Scanning electron microscope
patent, February 1999

Todokoro, Hideo; Ezumi, Makoto
US Patent Document 5,872,358
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5872358

Sequential Radial Mirror Analyser
patent-application, May 2013

Khursheed, Anjam; Hoang, Hung Quang
US Patent Application 13/679181; 20130126730
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130126730

Electron Spectrometer and Measurement Method
patent-application, September 2016

Nakagawa, Yasuhide
US Patent Application 15/064954; 20160268119
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20160268119

Charged Particle Beam Device
patent-application, August 2017

Kuroda, Koichi; Kawano, Hajime; Suzuki, Makoyo
US Patent Application 15/417887; 20170221672
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20170221672

Scanning Electron Microscope
patent-application, October 2002

Todokoro, Hideo; Takami, Sho; Ezumi, Makoto
US Patent Application 10/174053; 2002/0148960
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020148960

Scanning electron microscope
patent, September 2002

Todokoro, Hideo; Takami, Sho; Ezumi, Makoto
US Patent Document 6,444,981
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6444981

Scanning Electron Microscope
patent-application, September 2007

Todokoro, Hideo; Ezumi, Makoto; Ose, Yoichi
US Patent Application 11/802738; 20070221846
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070221846

Coaxial charged particle energy analyzer
patent, April 2011

Kelly, Michael A.; Bryson, III, Charles E.; Wu, Warren
US Patent Document 7,928,381
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7928381

Scanning electron microscope
patent, January 2003

Todokoro, Hideo; Takami, Sho; Ezumi, Makoto
US Patent Document 6,512,228
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6512228

Plasma Processing Apparatus
patent-application, September 2008

Kobayashi, Hiroyuki; Yokogawa, Kenetsu; Izawa, Masaru
US Patent Application 11/835455; 20080223522
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080223522

Particle-Optical Systems and Arrangement and Particle-Optical Components for Such Systems and Arrangements
patent-application, April 2016

Knippelmeyer, Rainer; Kienzle, Oliver; Kemen, Thomas
US Patent Application 14/975314; 2016/0111251
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20160111251

Distributed Potential Charged Particle Detector
patent-application, February 2012

Kneedler, Eric
US Patent Application 12/854008; 20120037802
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120037802

Patterned Wafer Inspection Method and Apparatus Therefor
patent-application, August 2002

Shinada, Hiroyuki; Yajima, Yusuke; Hasegawa, Hisaya
US Patent Application 09/164366; 20020117635
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020117635

Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope
patent, May 2010

James, Edward; Yang, Ye; Lin, Mark
US Patent Document 7,714,287
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7714287

Charged Corpuscular Particle Beam Irradiating Method, and Charged Corpuscular Particle Beam Apparatus
patent-application, June 2011

Doi, Takashi
US Patent Application 13/059654; 20110139983
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110139983

Electron-optical system and inspection method using the same
patent, December 2003

Takagi, Toru; Goto, Akihiro
US Patent Document 6,661,008
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6661008

Scanning electron microscope
patent, November 2007

Todokoro, Hideo; Ezumi, Makoto; Ose, Yoichi
US Patent Document 7,294,835
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7294835

Charged Particle Beam Apparatus
patent-application, March 2010

Enyama, Momoyo; Ohta, Hiroya; Kamimura, Osamu
US Patent Application 12/554577; 20100065753
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100065753

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Title: Apparatus, method and system for imaging and utilization of SEM charged particles

Abstract

Citation Formats

Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination patent, May 2014

Secondary Electron Optics and Detection Device patent-application, June 2014

Multi-beam ion/electron spectra-microscope patent, May 2011

High Throughput SEM Tool patent-application, July 2011

Scanning Electron Microscope and Electron Trajectory Adjustment Method Therefor patent-application, September 2017

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer journal, May 1999

Electron beam apparatus patent, June 2015

Retarding Potential Type Energy Analyzer patent-application, March 2018

Defect detection using energy spectrometer patent, October 2007

Energy Discriminating Electron Detector and Scanning Electron Microscope Using the Same patent-application, October 2017

Apparatus for Monitoring Process Chamber patent-application, July 2017

Method and apparatus for irradiating low-energy electrons patent, August 1992

Charged Particle Beam Device patent-application, May 2014

Scanning electron beam microscope patent, May 2000

Scanning electron microscope patent, February 1999

Sequential Radial Mirror Analyser patent-application, May 2013

Electron Spectrometer and Measurement Method patent-application, September 2016

Charged Particle Beam Device patent-application, August 2017

Scanning Electron Microscope patent-application, October 2002

Scanning electron microscope patent, September 2002

Scanning Electron Microscope patent-application, September 2007

Coaxial charged particle energy analyzer patent, April 2011

Scanning electron microscope patent, January 2003

Plasma Processing Apparatus patent-application, September 2008

Particle-Optical Systems and Arrangement and Particle-Optical Components for Such Systems and Arrangements patent-application, April 2016

Distributed Potential Charged Particle Detector patent-application, February 2012

Patterned Wafer Inspection Method and Apparatus Therefor patent-application, August 2002

Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope patent, May 2010

Charged Corpuscular Particle Beam Irradiating Method, and Charged Corpuscular Particle Beam Apparatus patent-application, June 2011

Electron-optical system and inspection method using the same patent, December 2003

Scanning electron microscope patent, November 2007

Charged Particle Beam Apparatus patent-application, March 2010

Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination
patent, May 2014

Secondary Electron Optics and Detection Device
patent-application, June 2014

Multi-beam ion/electron spectra-microscope
patent, May 2011

High Throughput SEM Tool
patent-application, July 2011

Scanning Electron Microscope and Electron Trajectory Adjustment Method Therefor
patent-application, September 2017

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer
journal, May 1999

Electron beam apparatus
patent, June 2015

Retarding Potential Type Energy Analyzer
patent-application, March 2018

Defect detection using energy spectrometer
patent, October 2007

Energy Discriminating Electron Detector and Scanning Electron Microscope Using the Same
patent-application, October 2017

Apparatus for Monitoring Process Chamber
patent-application, July 2017

Method and apparatus for irradiating low-energy electrons
patent, August 1992

Charged Particle Beam Device
patent-application, May 2014

Scanning electron beam microscope
patent, May 2000

Scanning electron microscope
patent, February 1999

Sequential Radial Mirror Analyser
patent-application, May 2013

Electron Spectrometer and Measurement Method
patent-application, September 2016

Charged Particle Beam Device
patent-application, August 2017

Scanning Electron Microscope
patent-application, October 2002

Scanning electron microscope
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Scanning Electron Microscope
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Coaxial charged particle energy analyzer
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Scanning electron microscope
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Plasma Processing Apparatus
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Particle-Optical Systems and Arrangement and Particle-Optical Components for Such Systems and Arrangements
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Distributed Potential Charged Particle Detector
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Patterned Wafer Inspection Method and Apparatus Therefor
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Charged Corpuscular Particle Beam Irradiating Method, and Charged Corpuscular Particle Beam Apparatus
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