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Title: Method for error correction in scanning probe microscopy

Abstract

Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1650967
Patent Number(s):
10670625
Application Number:
16/316,385
Assignee:
University of Florida Research Foundation, Inc. (Gainesville, FL)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/12/2017
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Zhang, Xiaoguang, Li, Xianqi, Li, An-Ping, Zhang, Hao, and Chen, Yunmei. Method for error correction in scanning probe microscopy. United States: N. p., 2020. Web.
Zhang, Xiaoguang, Li, Xianqi, Li, An-Ping, Zhang, Hao, & Chen, Yunmei. Method for error correction in scanning probe microscopy. United States.
Zhang, Xiaoguang, Li, Xianqi, Li, An-Ping, Zhang, Hao, and Chen, Yunmei. Tue . "Method for error correction in scanning probe microscopy". United States. https://www.osti.gov/servlets/purl/1650967.
@article{osti_1650967,
title = {Method for error correction in scanning probe microscopy},
author = {Zhang, Xiaoguang and Li, Xianqi and Li, An-Ping and Zhang, Hao and Chen, Yunmei},
abstractNote = {Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 02 00:00:00 EDT 2020},
month = {Tue Jun 02 00:00:00 EDT 2020}
}

Works referenced in this record:

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patent-application, March 2009


Scanning probe microscope
patent, August 2000


Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope
patent-application, October 2008


Tracking Qualification and Self-Optimizing Probe Microscope and Method
patent-application, February 2007


Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging
patent-application, March 2015


Method and Device for Checking and Examining the Inside Surface of Nuclear and Thermonuclear Assemblies
patent-application, February 2004


Scanning Probe Microscope
patent-application, October 2001


Harmonic Correcting Controller for a Scanning Probe Microscope
patent-application, August 2011


Scanning Electrochemical Microscopy
patent-application, February 2013