Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

Shu, Deming; Lai, Barry; Kearney, Steven P.; Anton, Jayson W.; Liu, Wenjun; Maser, Jorg M.; Roehrig, Christian; Tischler, Jonathan Z.

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A - human necessities
A01 - agriculture
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Title: Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

Abstract

An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.

Inventors:: Shu, Deming; Lai, Barry; Kearney, Steven P.; Anton, Jayson W.; Liu, Wenjun; Maser, Jorg M.; Roehrig, Christian; Tischler, Jonathan Z.

Issue Date:: Tue May 26 00:00:00 EDT 2020

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1650947

Patent Number(s):: 10663040

Application Number:: 15/662,086

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

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F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING
F16H21/04 - Guiding mechanisms, e.g. for straight-line guidance

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
H02N2/028 - {along multiple or arbitrary translation directions, e.g. XYZ stages}
H02N2/043 - {Mechanical transmission means, e.g. for stroke amplification}

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 07/27/2017

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats


                    Shu, Deming, Lai, Barry, Kearney, Steven P., Anton, Jayson W., Liu, Wenjun, Maser, Jorg M., Roehrig, Christian, and Tischler, Jonathan Z. Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance.  United States: N. p., 2020. 
        Web.

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                    Shu, Deming, Lai, Barry, Kearney, Steven P., Anton, Jayson W., Liu, Wenjun, Maser, Jorg M., Roehrig, Christian, & Tischler, Jonathan Z. Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance.  United States.

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                    Shu, Deming, Lai, Barry, Kearney, Steven P., Anton, Jayson W., Liu, Wenjun, Maser, Jorg M., Roehrig, Christian, and Tischler, Jonathan Z. Tue .  
        "Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance".  United States.  https://www.osti.gov/servlets/purl/1650947.

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@article{osti_1650947,

  title        = {Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance},

  author       = {Shu, Deming and Lai, Barry and Kearney, Steven P. and Anton, Jayson W. and Liu, Wenjun and Maser, Jorg M. and Roehrig, Christian and Tischler, Jonathan Z.},

  abstractNote = {An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue May 26 00:00:00 EDT 2020},

  month        = {Tue May 26 00:00:00 EDT 2020}

}

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Works referenced in this record:

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Shu, Deming
US Patent Document 5,896,200
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Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
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Shu, Deming; Maser, Jorg M.; Lai, Barry
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Linear Piezoelectric Nano-Positioner
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Redundantly constrained laminar structure as weak-link mechanisms
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Compact Nanofabrication Apparatus
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Redundantly constrained laminar structure as weak-link mechanisms
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Shu, Deming; Toellner, Thomas; Alp, E. Ercan
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Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
patent, October 2009

Shu, Deming; Yan, Hanfei; Maser, Jorg M.
US Patent Document 7,597,475
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Transducer
patent, April 2012

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Correction of frame loss during signal decoding
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Compound X-ray lens having multiple aligned zone plates
patent, September 2013

Lyon, Alan Francis; Feser, Michael; Yun, Wenbing
US Patent Document 8,526,575
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Transfer Apparatus Having Gimbal Mechanism and Transfer Method Using the Transfer Apparatus
patent-application, November 2006

Kokubo, Mitsunori; Iimura, Yukio; Kanemoto, Masakazu
US Patent Application 11/403984; 20060243761
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Hettrick, Michael C.; Underwood, James H.
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patent-application, August 2013

Watanabe, Masahiro; Nakata, Toshihiko; Tachizaki, Takehiro
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patent, June 1996

Shu, Deming; Barraza, Juan
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Similar Records

Title: Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

Abstract

Citation Formats

Optical design for laser encoder resolution extension and angular measurement patent, April 1999

Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument patent, February 2008

Linear Piezoelectric Nano-Positioner patent-application, December 2010

Redundantly constrained laminar structure as weak-link mechanisms patent, August 2003

Compact Nanofabrication Apparatus patent-application, January 2009

Redundantly constrained laminar structure as weak-link mechanisms patent, January 2006

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses patent, October 2009

Transducer patent, April 2012

Correction of frame loss during signal decoding patent, April 2017

Compound X-ray lens having multiple aligned zone plates patent, September 2013

Transfer Apparatus Having Gimbal Mechanism and Transfer Method Using the Transfer Apparatus patent-application, November 2006

Optical system for high resolution spectrometer/monochromator patent, October 1988

Scanning Probe Microscope and Surface Shape Measuring Method Using Same patent-application, August 2013

Low profile, high load vertical rolling positioning stage patent, June 1996

Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution patent, January 2012

Optical design for laser encoder resolution extension and angular measurement
patent, April 1999

Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
patent, February 2008

Linear Piezoelectric Nano-Positioner
patent-application, December 2010

Redundantly constrained laminar structure as weak-link mechanisms
patent, August 2003

Compact Nanofabrication Apparatus
patent-application, January 2009

Redundantly constrained laminar structure as weak-link mechanisms
patent, January 2006

Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
patent, October 2009

Transducer
patent, April 2012

Correction of frame loss during signal decoding
patent, April 2017

Compound X-ray lens having multiple aligned zone plates
patent, September 2013

Transfer Apparatus Having Gimbal Mechanism and Transfer Method Using the Transfer Apparatus
patent-application, November 2006

Optical system for high resolution spectrometer/monochromator
patent, October 1988

Scanning Probe Microscope and Surface Shape Measuring Method Using Same
patent-application, August 2013

Low profile, high load vertical rolling positioning stage
patent, June 1996

Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution
patent, January 2012