Title: Method of manufacturing image sensor including nanostructure color filter

Abstract

A method of manufacturing an image sensor includes: preparing a sensor substrate including: a sensor layer including a photosensitive cell; and a signal line layer including lines to receive electric signals from the photosensitive cell; forming a first material layer having a first refractive index on the sensor substrate; and forming a nanopattern layer on the first material layer, the nanopattern layer including a material having a second refractive index different from the first refractive index.

Inventors:

Han, Seunghoon; Kim, Yongsung; Kamali, Seyedeh Mahsa; Arbabi, Amir; Horie, Yu; Faraon, Andrei; Hwang, Sungwoo

Issue Date:

Tue Oct 01 00:00:00 EDT 2019

Research Org.:

Samsung Electronics Co., Ltd., Suwon-si (Korea); California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1576262

Patent Number(s):

10431624

Application Number:

15/193,229

Assignee:

Samsung Electronics Co., Ltd. (Suwon-si, KR); California Institute of Technology (Pasadena, CA)

Patent Classifications (CPCs):

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/76254 - {with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond}
H01L21/76256 - {using silicon etch back techniques, e.g. BESOI, ELTRAN}
H01L27/1203 - {the substrate comprising an insulating body on a semiconductor body, e.g. SOI
H01L27/14621 - {Colour filter arrangements}
H01L27/14685 - {Process for coatings or optical elements}
H01L27/14698 - {Post-treatment for the devices, e.g. annealing, impurity-gettering, shor-circuit elimination, recrystallisation}

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DOE Contract Number:  

SC0001293; W911NF-14-1-0345

Resource Type:

Patent

Resource Relation:

Patent File Date: 2016 Jun 27

Country of Publication:

United States

Language:

English

Subject:

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY