Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices
Abstract
A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1497869
- Patent Number(s):
- 10164188
- Application Number:
- 15/433,659
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Feb 15
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Ocola, Leonidas E., Gosztola, David J., and Yanguas-Gil, Angel. Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices. United States: N. p., 2018.
Web.
Ocola, Leonidas E., Gosztola, David J., & Yanguas-Gil, Angel. Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices. United States.
Ocola, Leonidas E., Gosztola, David J., and Yanguas-Gil, Angel. Tue .
"Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices". United States. https://www.osti.gov/servlets/purl/1497869.
@article{osti_1497869,
title = {Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices},
author = {Ocola, Leonidas E. and Gosztola, David J. and Yanguas-Gil, Angel},
abstractNote = {A polymer-hybrid electro-optic device is fabricated by providing a semiconductor substrate, depositing a metal electrode layer on the semiconductor substrate, depositing a dielectric barrier core layer within a gap of the metal electrode layer, patterning a polymer layer to cover the dielectric barrier core layer and partially covering the metal electrode layer, infiltrating the polymer layer with an inorganic component to form a hybrid oxide-polymer layer, and removing excess inorganic component from the semiconductor substrate and metal electrode layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 25 00:00:00 EST 2018},
month = {Tue Dec 25 00:00:00 EST 2018}
}
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