In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing

Li, Jian; Levi, Dean; Contreras, Miguel; Glynn, Stephen

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Title: In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing

Abstract

A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

Inventors:: Li, Jian; Levi, Dean; Contreras, Miguel; Glynn, Stephen

Issue Date:: Tue Sep 15 00:00:00 EDT 2015

Research Org.:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1214585

Patent Number(s):: 9136184

Application Number:: 14/112,033

Assignee:: Alliance For Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2021/213 - {Spectrometric ellipsometry}
G01N21/211 - {Ellipsometry
G01N21/8422 - {Investigating thin films, e.g. matrix isolation method}
G01N9/00 - Investigating density or specific gravity of materials

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L22/10 - {Measuring as part of the manufacturing process
H01L22/12 - {for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
H01L31/03923 - {including AIBIIICVI compound materials, e.g. CIS, CIGS}
H01L31/18 - Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/541 - CuInSe2 material PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

Show less

DOE Contract Number:: AC36-08GO28308

Resource Type:: Patent

Resource Relation:: Patent File Date: 2012 Feb 17

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY

Citation Formats


                    Li, Jian, Levi, Dean, Contreras, Miguel, and Glynn, Stephen. In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing.  United States: N. p., 2015. 
        Web.

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                    Li, Jian, Levi, Dean, Contreras, Miguel, & Glynn, Stephen. In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing.  United States.

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                    Li, Jian, Levi, Dean, Contreras, Miguel, and Glynn, Stephen. Tue .  
        "In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing".  United States.  https://www.osti.gov/servlets/purl/1214585.

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@article{osti_1214585,

  title        = {In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing},

  author       = {Li, Jian and Levi, Dean and Contreras, Miguel and Glynn, Stephen},

  abstractNote = {A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 15 00:00:00 EDT 2015},

  month        = {Tue Sep 15 00:00:00 EDT 2015}

}

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Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same
patent, January 2011

Krasnov, Alexey; den Boer, Willem; Thomsen, Scott V.
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Honecker, Dave; Michaluk, Christopher; Cox, Carl V.
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Elongated Photovoltaic Devices in Casings
patent-application, December 2008

Buller, Benyamin; Gronet, Christian M.; Morad, Ratson
US Patent Application 12/115485; 20080302418
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Thin-Film Solar Cell Having a Molybdenum-Containing Back Electrode Layer
patent-application, October 2010

Lackner, Harald; Leichtfried, Gerhard; Reinfried, Nikolaus
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Forming a Photovoltaic Device
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Title: In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing

Abstract

Citation Formats

Optical information storage and retrieval patent, December 1983

Method of fabricating high-efficiency Cu(In,Ga)(SeS).sub.2 thin films for solar cells patent, August 1995

In-situ monitoring of electrical properties by ellipsometry patent, March 2002

Processing approach towards the formation of thin-film Cu(In,Ga)Se2 patent, February 2003

Method of producing Cu (In, Ga) (Se, S) 2 semiconductor film patent, May 2003

Formation of solar cells with conductive barrier layers and foil substrates patent, June 2010

Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same patent, January 2011

Thin-film devices formed from solid particles patent, December 2011

Methods for producing sodium/molybdenum power compacts patent, June 2012

Elongated Photovoltaic Devices in Casings patent-application, December 2008

Thin-Film Solar Cell Having a Molybdenum-Containing Back Electrode Layer patent-application, October 2010

Forming a Photovoltaic Device patent-application, May 2011

The effect of Mo back contact on Na out-diffusion and device performance of Mo/Cu(In,Ga)Se/sub 2//CdS/ZnO solar cells conference, January 2002

Progress toward 20% efficiency in Cu(In,Ga)Se2 polycrystalline thin-film solar cells journal, July 1999

Development of CZTS-based thin film solar cells journal, February 2009

Synthesis of Optimized CZTS Thin Films for Photovoltaic Absorber Layers by Sputtering from Sulfide Targets and Sulfurization journal, January 2010

High-resolution incoherent imaging of crystals journal, February 1990

Effect of sodium diffusion on the structural and electrical properties of Cu2ZnSnS4 thin films journal, March 2011

Sputtered molybdenum bilayer back contact for copper indium diselenide-based polycrystalline thin-film solar cells journal, May 1995

Optical information storage and retrieval
patent, December 1983

Method of fabricating high-efficiency Cu(In,Ga)(SeS).sub.2 thin films for solar cells
patent, August 1995

In-situ monitoring of electrical properties by ellipsometry
patent, March 2002

Processing approach towards the formation of thin-film Cu(In,Ga)Se2
patent, February 2003

Method of producing Cu (In, Ga) (Se, S) 2 semiconductor film
patent, May 2003

Formation of solar cells with conductive barrier layers and foil substrates
patent, June 2010

Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same
patent, January 2011

Thin-film devices formed from solid particles
patent, December 2011

Methods for producing sodium/molybdenum power compacts
patent, June 2012

Elongated Photovoltaic Devices in Casings
patent-application, December 2008

Thin-Film Solar Cell Having a Molybdenum-Containing Back Electrode Layer
patent-application, October 2010

Forming a Photovoltaic Device
patent-application, May 2011

The effect of Mo back contact on Na out-diffusion and device performance of Mo/Cu(In,Ga)Se/sub 2//CdS/ZnO solar cells
conference, January 2002

Progress toward 20% efficiency in Cu(In,Ga)Se₂ polycrystalline thin-film solar cells
journal, July 1999

Development of CZTS-based thin film solar cells
journal, February 2009

Synthesis of Optimized CZTS Thin Films for Photovoltaic Absorber Layers by Sputtering from Sulfide Targets and Sulfurization
journal, January 2010

High-resolution incoherent imaging of crystals
journal, February 1990

Effect of sodium diffusion on the structural and electrical properties of Cu₂ZnSnS₄ thin films
journal, March 2011

Sputtered molybdenum bilayer back contact for copper indium diselenide-based polycrystalline thin-film solar cells
journal, May 1995