Wet-chemical systems and methods for producing black silicon substrates

Yost, Vernon; Yuan, Hao-Chih; Page, Matthew

Title: Wet-chemical systems and methods for producing black silicon substrates

Abstract

A wet-chemical method of producing a black silicon substrate. The method comprising soaking single crystalline silicon wafers in a predetermined volume of a diluted inorganic compound solution. The substrate is combined with an etchant solution that forms a uniform noble metal nanoparticle induced Black Etch of the silicon wafer, resulting in a nanoparticle that is kinetically stabilized. The method comprising combining with an etchant solution having equal volumes acetonitrile/acetic acid:hydrofluoric acid:hydrogen peroxide.

Inventors:: Yost, Vernon; Yuan, Hao-Chih; Page, Matthew

Issue Date:: Tue May 19 00:00:00 EDT 2015

Research Org.:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1179804

Patent Number(s):: 9034216

Application Number:: 13/825,541

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES
H01B1/00 - Conductors or conductive bodies characterised by the conductive materials

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/30604 - {Chemical etching}
H01L21/67086 - {with the semiconductor substrates being dipped in baths or vessels}
H01L31/02363 - {of the semiconductor body itself, e.g. textured active layers}
H01L31/1804 - {comprising only elements of Group IV of the Periodic System}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

Show less

DOE Contract Number:: AC36-08GO28308

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 36 MATERIALS SCIENCE; 14 SOLAR ENERGY

Citation Formats


                    Yost, Vernon, Yuan, Hao-Chih, and Page, Matthew. Wet-chemical systems and methods for producing black silicon substrates.  United States: N. p., 2015. 
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                    Yost, Vernon, Yuan, Hao-Chih, & Page, Matthew. Wet-chemical systems and methods for producing black silicon substrates.  United States.

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                    Yost, Vernon, Yuan, Hao-Chih, and Page, Matthew. Tue .  
        "Wet-chemical systems and methods for producing black silicon substrates".  United States.  https://www.osti.gov/servlets/purl/1179804.

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@article{osti_1179804,

  title        = {Wet-chemical systems and methods for producing black silicon substrates},

  author       = {Yost, Vernon and Yuan, Hao-Chih and Page, Matthew},

  abstractNote = {A wet-chemical method of producing a black silicon substrate. The method comprising soaking single crystalline silicon wafers in a predetermined volume of a diluted inorganic compound solution. The substrate is combined with an etchant solution that forms a uniform noble metal nanoparticle induced Black Etch of the silicon wafer, resulting in a nanoparticle that is kinetically stabilized. The method comprising combining with an etchant solution having equal volumes acetonitrile/acetic acid:hydrofluoric acid:hydrogen peroxide.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue May 19 00:00:00 EDT 2015},

  month        = {Tue May 19 00:00:00 EDT 2015}

}

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Putnam, Morgan C.; Turner-Evans, Daniel B.; Kelzenberg, Michael D.
Applied Physics Letters, Vol. 95, Issue 16, 163116
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Surface texturing for silicon solar cells using reactive ion etching technique
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Kumaravelu, G.; Alkaisi, M. M.; Bittar, A.
Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference 2002, Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002.
https://doi.org/10.1109/PVSC.2002.1190507

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Title: Wet-chemical systems and methods for producing black silicon substrates

Abstract

Citation Formats

Method for Making a Semiconductor Switching Device patent, April 1975

Optically black coating and process for forming it patent, September 1978

Process and apparatus for producing non-glare glass by etching patent, March 1993

Method of producing semiconductor substrate patent, October 1993

Superconducting detector and method of making same patent, November 1993

Photonic silicon on a transparent substrate patent, July 2000

Micromechanical membrane tilt-mirror switch patent, January 2001

Derivatization of silicon surfaces patent, September 2001

Metal catalyst technique for texturing silicon solar cells patent, December 2001

Electrophoretic displays using nanoparticles patent, March 2003

Electrophoretic displays using nanoparticles patent, April 2004

Method of fabricating a semiconductor device patent, July 2004

Metal-assisted chemical etch to produce porous group III-V materials patent, July 2004

Metal-assisted chemical etch porous silicon formation method patent, September 2004

Electroless deposition method patent, May 2005

Electroless deposition method patent, June 2005

Lithography-based patterning of layer-by-layer nano-assembled thin films patent, August 2006

Method for producing multicrystalline silicon substrate for solar cells patent, November 2006

Method of fabricating a semiconductor device patent, November 2006

Methods of selective deposition of fine particles onto selected regions of a substrate patent, January 2009

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device patent, September 2009

Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same patent, May 2010

Method for producing silicon substrate for solar cells patent, November 2011

Methods of selective deposition of fine particles onto selected regions of a substrate patent, November 2011

Nanoparticle-based etching of silicon surfaces patent, December 2011

Method of manufacturing solar cell patent, February 2012

Method of fabricating solar cell patent, February 2012

Method for forming silicon trench patent, June 2012

Method for producing silicon nanostructures patent, December 2012

Method of forming nanoscale three-dimensional patterns in a porous material patent, July 2013

Method of fabricating a semiconductor device patent-application, June 2002

Systems and methods for forming processing streams patent-application, August 2002

Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation patent-application, September 2002

Electrophoretic displays using nanoparticles patent-application, October 2002

Electrophoretic displays using nanoparticles patent-application, May 2003

Method for raw etching silicon solar cells patent-application, June 2003

Electroless deposition method patent-application, October 2003

Spatial light modulators with light absorbing areas patent-application, May 2014

Spatial Light Modulators With Light Blocking/absorbing Areas patent-application, May 2004

Method of fabricating a semiconductor device patent-application, December 2004

Methods of nanostructure formation and shape selection patent-application, March 2005

Method for producing multicrystalline silicon substrate for solar cells patent-application, May 2005

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device patent-application, June 2005

Devices and methods for enhanced microneedle penetration of biological barriers patent-application, June 2005

Self-assembled structures patent-application, December 2005

Method for forming high-resolution pattern with direct writing means patent-application, December 2006

Method for forming high-resolution pattern and substrate having prepattern formed thereby patent-application, December 2006

Method and Device for Modulating Light patent-application, May 2007

Method of fabricating semiconductor device patent-application, June 2007

Light Emitting Device patent-application, July 2007

Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS) patent-application, July 2007

Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels patent-application, July 2007

Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials patent-application, August 2007

Method for Patterning Metal Using Nanoparticle Containing Precursors patent-application, August 2007

Methods for producing MEMS with protective coatings using multi-component sacrificial layers patent-application, September 2007

Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS) patent-application, October 2007

Novel Nanoparticle Patterning Process patent-application, December 2007

Solar cell, method of manufacturing the same, and method of texturing solar cell patent-application, July 2009

Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions patent-application, September 2009

Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same patent-application, December 2009

Metal-Assisted Chemical Etching of Substrates patent-application, September 2010

Method for preparing substrate with periodical structure patent-application, October 2010

Silicon substrate with periodical structure patent-application, October 2010

Microscreen for filtering particles in microfluidics applications and production thereof patent-application, November 2010

High-Productivity Porous Semiconductor Manufacturing Equipment patent-application, February 2011

Solar Cells with Textured Surfaces patent-application, February 2011

Method of fabricating solar cell patent-application, June 2011

Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces patent-application, December 2011

Semiconductor storage device and manufacturing method thereof patent-application, December 2011

Solae Energy Systems patent-application, February 2012

Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate patent-application, April 2012

Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production patent-application, May 2012

Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces patent-application, July 2012

Texturing Surface of Light Absorbing Substrate patent-application, September 2012

Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures patent-application, February 2013

Nanostructured black silicon and the optical reflectance of graded-density surfaces journal, June 2009

Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules journal, September 2009

Method for Making a Semiconductor Switching Device
patent, April 1975

Optically black coating and process for forming it
patent, September 1978

Process and apparatus for producing non-glare glass by etching
patent, March 1993

Method of producing semiconductor substrate
patent, October 1993

Superconducting detector and method of making same
patent, November 1993

Photonic silicon on a transparent substrate
patent, July 2000

Micromechanical membrane tilt-mirror switch
patent, January 2001

Derivatization of silicon surfaces
patent, September 2001

Metal catalyst technique for texturing silicon solar cells
patent, December 2001

Electrophoretic displays using nanoparticles
patent, March 2003

Electrophoretic displays using nanoparticles
patent, April 2004

Method of fabricating a semiconductor device
patent, July 2004

Metal-assisted chemical etch to produce porous group III-V materials
patent, July 2004

Metal-assisted chemical etch porous silicon formation method
patent, September 2004

Electroless deposition method
patent, May 2005

Electroless deposition method
patent, June 2005

Lithography-based patterning of layer-by-layer nano-assembled thin films
patent, August 2006

Method for producing multicrystalline silicon substrate for solar cells
patent, November 2006

Method of fabricating a semiconductor device
patent, November 2006

Methods of selective deposition of fine particles onto selected regions of a substrate
patent, January 2009

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent, September 2009

Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same
patent, May 2010

Method for producing silicon substrate for solar cells
patent, November 2011

Methods of selective deposition of fine particles onto selected regions of a substrate
patent, November 2011

Nanoparticle-based etching of silicon surfaces
patent, December 2011

Method of manufacturing solar cell
patent, February 2012

Method of fabricating solar cell
patent, February 2012

Method for forming silicon trench
patent, June 2012

Method for producing silicon nanostructures
patent, December 2012

Method of forming nanoscale three-dimensional patterns in a porous material
patent, July 2013

Method of fabricating a semiconductor device
patent-application, June 2002

Systems and methods for forming processing streams
patent-application, August 2002

Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
patent-application, September 2002

Electrophoretic displays using nanoparticles
patent-application, October 2002

Electrophoretic displays using nanoparticles
patent-application, May 2003

Method for raw etching silicon solar cells
patent-application, June 2003

Electroless deposition method
patent-application, October 2003

Spatial light modulators with light absorbing areas
patent-application, May 2014

Spatial Light Modulators With Light Blocking/absorbing Areas
patent-application, May 2004

Method of fabricating a semiconductor device
patent-application, December 2004

Methods of nanostructure formation and shape selection
patent-application, March 2005

Method for producing multicrystalline silicon substrate for solar cells
patent-application, May 2005

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent-application, June 2005

Devices and methods for enhanced microneedle penetration of biological barriers
patent-application, June 2005

Self-assembled structures
patent-application, December 2005

Method for forming high-resolution pattern with direct writing means
patent-application, December 2006

Method for forming high-resolution pattern and substrate having prepattern formed thereby
patent-application, December 2006

Method and Device for Modulating Light
patent-application, May 2007

Method of fabricating semiconductor device
patent-application, June 2007

Light Emitting Device
patent-application, July 2007

Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS)
patent-application, July 2007

Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels
patent-application, July 2007

Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials
patent-application, August 2007

Method for Patterning Metal Using Nanoparticle Containing Precursors
patent-application, August 2007

Methods for producing MEMS with protective coatings using multi-component sacrificial layers
patent-application, September 2007

Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS)
patent-application, October 2007

Novel Nanoparticle Patterning Process
patent-application, December 2007

Solar cell, method of manufacturing the same, and method of texturing solar cell
patent-application, July 2009

Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions
patent-application, September 2009

Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same
patent-application, December 2009

Metal-Assisted Chemical Etching of Substrates
patent-application, September 2010

Method for preparing substrate with periodical structure
patent-application, October 2010

Silicon substrate with periodical structure
patent-application, October 2010

Microscreen for filtering particles in microfluidics applications and production thereof
patent-application, November 2010

High-Productivity Porous Semiconductor Manufacturing Equipment
patent-application, February 2011

Solar Cells with Textured Surfaces
patent-application, February 2011

Method of fabricating solar cell
patent-application, June 2011

Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces
patent-application, December 2011

Semiconductor storage device and manufacturing method thereof
patent-application, December 2011

Solae Energy Systems
patent-application, February 2012

Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate
patent-application, April 2012

Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production
patent-application, May 2012

Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces
patent-application, July 2012

Texturing Surface of Light Absorbing Substrate
patent-application, September 2012

Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures
patent-application, February 2013

Nanostructured black silicon and the optical reflectance of graded-density surfaces
journal, June 2009

Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
journal, September 2009

Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells
journal, September 2011

Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011

Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006