DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method of producing nanopatterned articles, and articles produced thereby

Abstract

A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.

Inventors:
; ;
Issue Date:
Research Org.:
University of Massachusetts, Boston, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1178670
Patent Number(s):
9018649
Application Number:
14/048,073
Assignee:
The University of Massachusetts, Boston, MA (United States)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-96ER45612
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Oct 08
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Russell, Thomas P, Park, Soojin, and Xu, Ting. Method of producing nanopatterned articles, and articles produced thereby. United States: N. p., 2015. Web.
Russell, Thomas P, Park, Soojin, & Xu, Ting. Method of producing nanopatterned articles, and articles produced thereby. United States.
Russell, Thomas P, Park, Soojin, and Xu, Ting. Tue . "Method of producing nanopatterned articles, and articles produced thereby". United States. https://www.osti.gov/servlets/purl/1178670.
@article{osti_1178670,
title = {Method of producing nanopatterned articles, and articles produced thereby},
author = {Russell, Thomas P and Park, Soojin and Xu, Ting},
abstractNote = {A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 28 00:00:00 EDT 2015},
month = {Tue Apr 28 00:00:00 EDT 2015}
}

Works referenced in this record:

Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate
journal, August 2001


Nano-Patterning for Patterned Media using Block-Copolymer
journal, January 2002


Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates
journal, October 2002


Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
journal, July 2001


Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors
journal, November 1999


Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film
journal, February 2003


Large-Scale Alignment of ABC Block Copolymer Microdomains via Solvent Vapor Treatment
journal, February 2000


Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications
journal, February 2001


Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography
journal, March 2000


Large-Area Domain Alignment in Block Copolymer Thin Films Using Electric Fields
journal, June 1998


Local Control of Microdomain Orientation in Diblock Copolymer Thin Films with Electric Fields
journal, August 1996


Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997


A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates
journal, April 2008


Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent
journal, April 2001


Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces:  Parallel, Perpendicular and Mixed Lamellar Morphologies
journal, February 1999


Block copolymers as nanoscopic templates
journal, October 2000


Micellar Inorganic-Polymer Hybrid Systems—A Tool for Nanolithography
journal, February 1999


Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates
journal, December 2000


Mesoporous Polystyrene Monoliths
journal, February 2001

  • Zalusky, Andrew S.; Olayo-Valles, Roberto; Taylor, Charles J.
  • Journal of the American Chemical Society, Vol. 123, Issue 7, p. 1519-1520
  • https://doi.org/10.1021/ja003936g

Polymers on Nanoperiodic, Heterogeneous Surfaces
journal, March 1999


Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films
journal, February 2001


Small Angle Neutron Scattering Studies on Ultrathin Films
journal, May 1995


Directed Self-Assembly of Two Kinds of Nanoparticles Utilizing Monolayer Films of Diblock Copolymer Micelles
journal, May 2003


Sluggish Development of Parallel Lamellae at the Strongly Interacting Interface in Thin Films of Symmetric Diblock Copolymers
journal, December 2002


Faceting Kinetics of Stepped Si(113) Surfaces: A Time-Resolved X-Ray Scattering Study
journal, June 1995


Predicting the Mesophases of Copolymer-Nanoparticle Composites
journal, June 2001


Overcoming Interfacial Interactions with Electric Fields
journal, May 2000


Enabling nanotechnology with self assembled block copolymer patterns
journal, October 2003


Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors
journal, January 2011


Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography
journal, August 2001


Microdomain patterns from directional eutectic solidification and epitaxy
journal, May 2000


Block Copolymer Thin Films: Physics and Applications
journal, August 2001


Spatially Controlled Fabrication of Nanoporous Block Copolymers
journal, October 2004


Patterned Magnetic Recording Media
journal, August 2001


Plasmonics-A Route to Nanoscale Optical Devices
journal, September 2001


Patterning with block copolymer thin films
journal, February 2005


Graphoepitaxy of Spherical Domain Block Copolymer Films
journal, August 2001


Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
journal, June 2005


Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
journal, December 2000


Study of oriented block copolymers films obtained by roll-casting
journal, September 2002


One-Dimensional Arrangements of Metal Nanoclusters
journal, April 2002


Block Copolymer Surface Reconstuction: A Reversible Route to Nanoporous Films
journal, September 2003


Templating the patterning of gold nanoparticles using a stained triblock copolymer film surface
journal, January 2003


Spin-Dependent Tunneling in Self-Assembled Cobalt-Nanocrystal Superlattices
journal, November 2000


Block Copolymer Nanocomposites: Perspectives for Tailored Functional Materials
journal, June 2005


Observed Substrate Topography-Mediated Lateral Patterning of Diblock Copolymer Films
journal, October 1997


Fabrication of nanostructures with long-range order using block copolymer lithography
journal, November 2002


Control of Nanoparticle Location in Block Copolymers
journal, April 2005


Sub-10 nm imprint lithography and applications
journal, November 1997


Covalent stabilization of nanostructures: Robust block copolymer templates from novel thermoreactive systems
journal, January 2005

  • Drockenmuller, Eric; Li, Lucy Y. T.; Ryu, Du Yeol
  • Journal of Polymer Science Part A: Polymer Chemistry, Vol. 43, Issue 5, p. 1028-1037
  • https://doi.org/10.1002/pola.20553

Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006


Electron Transfer in Self-Assembled Inorganic Polyelectrolyte/Metal Nanoparticle Heterostructures
journal, January 1996


Block copolymer micelle nanolithography on non-conductive substrates
journal, January 2004


Chemical Nanolithography with Electron Beams
journal, June 2001


Nano-structured micropatterns by combination of block copolymer self-assembly and UV photolithography
journal, September 2006


Process integration of self-assembled polymer templates into silicon nanofabrication
journal, January 2002

  • Guarini, K. W.; Black, C. T.; Zhang, Y.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, Article No. 2788
  • https://doi.org/10.1116/1.1521730

Solvent-induced microdomain orientation in polystyrene-b-poly(l-lactide) diblock copolymer thin films for nanopatterning
journal, October 2005


Impedance Characteristics of the Nanoporous Honeycomb Diamond Electrodes for Electrical Double-Layer Capacitor Applications
journal, May 2001


Catalytic Activity of Supported Au Nanoparticles Deposited from Block Copolymer Micelles
journal, June 2003

  • Jaramillo, Thomas F.; Baeck, Sung-Hyeon; Cuenya, Beatriz Roldan
  • Journal of the American Chemical Society, Vol. 125, Issue 24, p. 7148-7149
  • https://doi.org/10.1021/ja029800v

Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films
journal, November 2005


Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation
journal, February 2004


Salt Complexation in Block Copolymer Thin Films
journal, November 2006


Characterization of pattern transfer in the fabrication of magnetic nanostructure arrays by block copolymer lithography
journal, June 2007


A Rapid Route to Arrays of Nanostructures in Thin Films
journal, October 2002


Self-directed self-assembly of nanoparticle/copolymer mixtures
journal, March 2005


Hierarchical self-assembly of metal nanostructures on diblock copolymer scaffolds
journal, December 2001


Self-assembly of functional nanostructures from ABC triblock copolymers
journal, October 2003


Tailored Polymer Surfaces
journal, January 1997


Self-Assembled Masks for the Transfer of Nanometer-Scale Patterns into Surfaces:  Characterization by AFM and LFM
journal, February 2002


Optical Alignment and Patterning of Nanoscale Microdomains in a Block Copolymer Thin Film
journal, April 2006


Aluminum nanowire polarizing grids: Fabrication and analysis
journal, May 2006


Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order
journal, February 2009


From Nanorings to Nanodots by Patterning with Block Copolymers
journal, June 2008


Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films
journal, December 2007


Large area dense nanoscale patterning of arbitrary surfaces
journal, July 2001


Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films
journal, February 2008


Controlling Polymer-Surface Interactions with Random Copolymer Brushes
journal, March 1997


Patternable Block Copolymers
book, October 2005


Block copolymer patterns and templates
journal, September 2006


Ordered Block-Copolymer Assembly Using Nanoimprint Lithography
journal, September 2004


Long-Range Ordering of Diblock Copolymers Induced by Droplet Pinning
journal, November 2003


Nanodomain control in copolymer thin films
journal, October 1998


Transfer of a chemical substrate pattern into an island-forming diblock copolymer film
journal, December 1999


Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
journal, December 2005


Controlled Arrangement of Nanoparticle Arrays in Block-Copolymer Domains
journal, May 2006


Nanotechnology with Soft Materials
journal, April 2003


Poly(alkenyl substituted aromatic) and elastomer containing polymer compositions and process for their preparation
patent, January 1992


Nanoimprint lithography
patent, June 1998


Indium gallium nitride smoothing structures for III-nitride devices
patent, October 2003


Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, June 2004


Large area orientation of block copolymer microdomains in thin films
patent, May 2005


Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, August 2005


Method of fabricating patterned polymer film with nanometer scale
patent, July 2006


Method of manufacturing a wafer
patent, November 2006


Nanofabrication
patent, March 2007


Nanocylinder arrays
patent, March 2007


Nanopatterned templates from oriented degradable diblock copolymer thin films
patent, December 2009


Method of producing nanopatterned articles, and articles produced thereby
patent, July 2012


Self-assembly of block copolymers on topographically patterned polymeric substrates
patent, August 2012


Method of producing nanopatterned articles, and articles produced thereby
patent, November 2013


Inorganic nanoporous membranes and methods to form same
patent-application, July 2004


Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent-application, September 2004


Nanopatterned templates from oriented degradable diblock copolymer thin films
patent-application, December 2004


Composition containing a cross-linkable matrix precursor and a poragen, and a porous matrix prepared therefrom
patent-application, January 2005


Method for catalytic growth of nanotubes or nanofibers comprising a nisi alloy diffusion barrier
patent-application, October 2005


Method for manufacturing porous structure and method for forming pattern
patent-application, October 2006


Structure And Method For Stochastic Integrated Circuit Personalization
patent-application, July 2008


Method of producing nanopatterned templates
patent-application, September 2008


Self-assembly of block copolymers on topographically patterned polymeric substrates
patent-application, March 2010


Method of producing nanopatterned articles, and articles produced thereby
patent-application, April 2010