Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation
Abstract
A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175560
- Patent Number(s):
- 6967757
- Application Number:
- 10/722,237
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Allen, James J., Sinclair, Michael B., and Dohner, Jeffrey L. Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation. United States: N. p., 2005.
Web.
Allen, James J., Sinclair, Michael B., & Dohner, Jeffrey L. Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation. United States.
Allen, James J., Sinclair, Michael B., and Dohner, Jeffrey L. Tue .
"Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation". United States. https://www.osti.gov/servlets/purl/1175560.
@article{osti_1175560,
title = {Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation},
author = {Allen, James J. and Sinclair, Michael B. and Dohner, Jeffrey L.},
abstractNote = {A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 22 00:00:00 EST 2005},
month = {Tue Nov 22 00:00:00 EST 2005}
}
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Works referenced in this record:
MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report
report, December 2002
- Dagel, Daryl; Allen, James
Extending the travel range of analog-tuned electrostatic actuators
journal, January 1999
- Hung, E. S.; Senturia, S. D.
- Journal of Microelectromechanical Systems, Vol. 8, Issue 4