System for precise position registration
Abstract
An apparatus for enabling accurate retaining of a precise position, such as for reacquisition of a microscopic spot or feature having a size of 0.1 mm or less, on broad-area surfaces after non-in situ processing. The apparatus includes a sample and sample holder. The sample holder includes a base and three support posts. Two of the support posts interact with a cylindrical hole and a U-groove in the sample to establish location of one point on the sample and a line through the sample. Simultaneous contact of the third support post with the surface of the sample defines a plane through the sample. All points of the sample are therefore uniquely defined by the sample and sample holder. The position registration system of the current invention provides accuracy, as measured in x, y repeatability, of at least 140 .mu.m.
- Inventors:
- Issue Date:
- Research Org.:
- Southeastern Universities Research Association, Inc.,Newport News, VA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175559
- Patent Number(s):
- 6967336
- Application Number:
- 10/826,220
- Assignee:
- Southeastern Universities Research Association, Inc.
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23Q - DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16M - FRAMES, CASINGS, OR BEDS OF ENGINES OR OTHER MACHINES OR APPARATUS NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUS PROVIDED FOR ELSEWHERE
- DOE Contract Number:
- AC05-84ER
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Sundelin, Ronald M., and Wang, Tong. System for precise position registration. United States: N. p., 2005.
Web.
Sundelin, Ronald M., & Wang, Tong. System for precise position registration. United States.
Sundelin, Ronald M., and Wang, Tong. Tue .
"System for precise position registration". United States. https://www.osti.gov/servlets/purl/1175559.
@article{osti_1175559,
title = {System for precise position registration},
author = {Sundelin, Ronald M. and Wang, Tong},
abstractNote = {An apparatus for enabling accurate retaining of a precise position, such as for reacquisition of a microscopic spot or feature having a size of 0.1 mm or less, on broad-area surfaces after non-in situ processing. The apparatus includes a sample and sample holder. The sample holder includes a base and three support posts. Two of the support posts interact with a cylindrical hole and a U-groove in the sample to establish location of one point on the sample and a line through the sample. Simultaneous contact of the third support post with the surface of the sample defines a plane through the sample. All points of the sample are therefore uniquely defined by the sample and sample holder. The position registration system of the current invention provides accuracy, as measured in x, y repeatability, of at least 140 .mu.m.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 22 00:00:00 EST 2005},
month = {Tue Nov 22 00:00:00 EST 2005}
}