Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon
Abstract
The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive .alpha.-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf .alpha.-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf .alpha.-mode plasmas for various materials processing applications.
- Inventors:
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175401
- Patent Number(s):
- 6909237
- Application Number:
- 10/205,786
- Assignee:
- The Regents of the University of California (Los Alamos, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
Citation Formats
Park, Jaeyoung, and Henins, Ivars. Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon. United States: N. p., 2005.
Web.
Park, Jaeyoung, & Henins, Ivars. Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon. United States.
Park, Jaeyoung, and Henins, Ivars. Tue .
"Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon". United States. https://www.osti.gov/servlets/purl/1175401.
@article{osti_1175401,
title = {Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon},
author = {Park, Jaeyoung and Henins, Ivars},
abstractNote = {The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive .alpha.-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf .alpha.-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf .alpha.-mode plasmas for various materials processing applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 21 00:00:00 EDT 2005},
month = {Tue Jun 21 00:00:00 EDT 2005}
}