Method of fabricating a micro machine

Stalford, Harold L

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Title: Method of fabricating a micro machine

Abstract

A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.

Inventors:: Stalford, Harold L

Issue Date:: Tue Nov 11 00:00:00 EST 2014

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1163671

Patent Number(s):: 8884474

Application Number:: 11/757,313

Assignee:: MicroZeus, LLC (Dallas, TX)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B7/02 - containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
H02N10/00 - Electric motors using thermal effects {

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2007 Jun 01

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY

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                    Stalford, Harold L. Method of fabricating a micro machine.  United States: N. p., 2014. 
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                    Stalford, Harold L. Method of fabricating a micro machine.  United States.

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        "Method of fabricating a micro machine".  United States.  https://www.osti.gov/servlets/purl/1163671.

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@article{osti_1163671,

  title        = {Method of fabricating a micro machine},

  author       = {Stalford, Harold L},

  abstractNote = {A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Nov 11 00:00:00 EST 2014},

  month        = {Tue Nov 11 00:00:00 EST 2014}

}

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Works referenced in this record:

Remote Control Valve Operator
patent, September 1961

Usab, M. A.
US Patent Document 2,998,805
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/2998805

Monitoring Devices for Detecting Fission Products in a Gaseous Stream
patent, June 1964

Graftieaux, J.
US Patent Document 3,136,891
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3136891

Cassette tape recorder
patent, February 1979

Osanai, Akira
US Patent Document 4,139,167
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4139167

Direct current micromotor
patent, April 1982

Caby, Jean-Claude; Girardin, Jean-Claude
US Patent Document 4,323,805
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4323805

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train
patent, January 1984

Muller, Jacques; Mock, Elmar
US Patent Document 4,426,158
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4426158

Rotary, vertical-drive, tethered micromotor
patent, February 1993

Carr, Willian N.; Yu, Hong-Chow; Dong-Il, Dan C.
US Patent Document 5,189,323
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5189323

Shaft support assembly for use in a polygon mirror drive motor
patent, October 1993

Ide, Russell D.
US Patent Document 5,254,893
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5254893

Cooling microfan arrangements and process
patent, March 1994

Cronin, John; Previti-Kelly, Rosemary A.; Ryan, James G.
US Patent Document 5,296,775
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5296775

Stirring device
patent, September 1995

Rokugawa, Kyuji; Inoue, Morito; Sakaguchi, Soichiro
US Patent Document 5,449,493
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5449493

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
patent, May 1997

Garcia, Ernest J.; Sniegowski, Jeffry J.
US Patent Document 5,631,514
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5631514

Fully integrated magnetic micromotors and methods for their fabrication
patent, January 1998

Allen, Mark G.; Ahn, Chong H.
US Patent Document 5,710,466
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5710466

Process to destroy biological activity in protein-containing feed
patent, July 1998

Rohwer, Gary L.
US Patent Document 5,780,288
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5780288

Micro-turbo generator device
patent, February 1999

Wiegele, Thomas G.; Wyatt, Karl W.; Duffie, Neil A.
US Patent Document 5,874,798
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5874798

Microelectromechanical reciprocating-tooth indexing apparatus
patent, September 1999

Allen, James J.
US Patent Document 5,959,376
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5959376

Compliant displacement-multiplying apparatus for microelectromechanical systems
patent, January 2001

Kota, Sridhar; Rodgers, M. Steven; Hetrick, Joel
US Patent Document 6,175,170
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6175170

Micromotor and micropump
patent, January 2001

Weisener, Thomas; Voegele, Gerald; Widmann, Mark
US Patent Document 6,179,596
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6179596

Microelectromechanical ratcheting apparatus
patent, April 2001

Barnes, Stephen Matthew; Miller, Samuel Lee; Jensen, Brian D.
US Patent Document 6,211,599
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6211599

Floating brush seal
patent, June 2001

Braun, Minel J.; Choy, Fred K.
US Patent Document 6,244,599
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6244599

Microelectromechanical ratcheting apparatus
patent, November 2001

Barnes, Stephen Matthew; Miller, Samuel Lee; Jensen, Brian D.
US Patent Document 6,313,562
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6313562

Mems magnetically actuated switches and associated switching arrays
patent, April 2002

Hill, Edward A.; Mahadevan, Ramaswamy
US Patent Document 6,366,186
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6366186

Microturbomachinery
patent, May 2002

Epstein, Alan H.; Senturia, Stephen D.; Waitz, Ian A.
US Patent Document 6,392,313
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6392313

Shaft sealing assembly having replaceable sealing sleeve
patent, September 2003

White, James E.
US Patent Document 6,616,326
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6616326

Low cost integrated out-of-plane micro-device structures and method of making
patent, December 2003

Fork, David K.; Chua, Christopher L.; Van Schuylenbergh, Koenraad F.
US Patent Document 6,655,964
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6655964

Method of forming an out-of-plane structure
patent, February 2005

Fork, David K.; Mei, Ping; Van Schuylenbergh, Koenraad F.
US Patent Document 6,848,175
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6848175

Erected mirror optical switch
patent, June 2005

Allen, James J.
US Patent Document 6,903,861
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6903861

Photolithographically-patterned variable capacitor structures and method of making
patent, July 2005

Chua, Christopher L.; Peeters, Eric; Van Schuylenbergh, Koenraad F.
US Patent Document 6,922,327
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6922327

System and method for handling microcomponent parts for performing assembly of micro-devices
patent, December 2005

Mercanzini, Andre
US Patent Document 6,973,365
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6973365

Piezoelectric motors and motor driving configurations
patent, December 2005

Ganor, Ze'ev; Shiv, Lior; Karasikov, Nir
US Patent Document 6,979,936
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6979936

Method for assembly of complementary-shaped receptacle site and device microstructures
patent, March 2006

Brewer, Peter D.; Hunter, Andrew T.; Deckard, Luisa M.
US Patent Document 7,018,575
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7018575

Sockets for microassembly
patent, April 2006

Tsui, Kenneth; Geisberger, Aaron A.
US Patent Document 7,025,619
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7025619

Microstructures using carbon fiber composite honeycomb beams
patent, May 2006

Wood, Robert
US Patent Document 7,036,769
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7036769

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patent, May 2006

Reis, Eugene
US Patent Document 7,044,653
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7044653

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patent, August 2006

Nilsen, Erik; Ellis, Matthew D.; Goldsmith, Charles L.
US Patent Document 7,096,568
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7096568

Piezoelectric actuator, timepiece, and electronic device
patent, September 2006

Kitahara, Joji; Seki, Shigeaki
US Patent Document 7,109,638
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7109638

Magnetically-coupled actuating valve assembly
patent, January 2007

Taylor, Marc D.; Haynes, Michael L.
US Patent Document 7,159,842
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7159842

Positioning device for microscopic motion
patent, March 2007

Baur, Christof; Bray, Kenneth
US Patent Document 7,196,454
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7196454

Coupled drive multi-position fluid valve apparatus and method
patent, April 2007

Poppe, Carl H.; Servin, Carl M.; Nichols, Jon
US Patent Document 7,201,185
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7201185

Modular manipulation system for manipulating a sample under study with a microscope
patent, May 2007

Yu, Min-Feng; Dyer, Mark J.; Bray, Ken
US Patent Document 7,220,973
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7220973

Drive apparatus and device with same
patent, May 2008

Moteki, Masatoshi; Mizutani, Tadahiro
US Patent Document 7,378,777
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7378777

Sealed mover assembly
patent, September 2008

Williams, Eric C.; Arnone, David F.
US Patent Document 7,423,364
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7423364

MEMS micromotor and timepiece equipped with this micromotor
patent, March 2009

Paratte, Lionel; Noell, Wilfried; Rebeaud, Jean-Philippe
US Patent Document 7,505,373
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7505373

Method of appraising and insuring intellectual property
patent, May 2009

Block, Robert
US Patent Document 7,536,312
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7536312

Drive device, particularly for a clockwork mechanism
patent, December 2009

Minotti, Patrice; Bourbon, Gilles; Le Moal, Patrice
US Patent Document 7,636,277
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7636277

Method for assembling precision miniature bearings for minisystems and microsystems
patent, April 2010

Voegele, Gerald; Weisener, Thomas; Christmann, Helmut
US Patent Document 7,698,818
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7698818

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
patent-application, April 2002

Mastromatteo, Ubaldo; Murari, Bruno
US Patent Application 09/925847; 20020041729
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020041729

Bi-directional micromechanical latching linear actuator
patent-application, December 2002

Fischer, Kevin J.; Guckel, Henry; Guckel, Mary
US Patent Application 09/873935; 20020181886
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020181886

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
patent-application, October 2003

Bang, Christopher A.; Cohen, Adam L.; Lockard, Michael S.
US Patent Application 10/313795; 20030183008
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030183008

Low cost integrated out-of-plane micro-device structures and method of making
patent-application,

Fork, David K.; Mei, Ping; Van Schuylenbergh, Koenraad F.
11/13/2003, vp
US Patent Application 10/417544; 20030211761
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030211761

MEMS based motor
patent-application, June 2004

Takada, Akio; Yeo, Ching Biing; Cheng, Cheow Tong
US Patent Application 10/730472; 20040119354
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040119354

Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems
patent-application, July 2004

Chen, Ching Jen; Galambos, Paul Charles; Haik, Yousef
US Patent Application 10/697412: 20040126254
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040126254

Sealed Mover Assembly
patent-application, January 2005

Williams, Eric C.; Arnone, David F.
US Patent Application 10/888028; 20050006982
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050006982

Oil-retaining structure for fan
patent-application, February 2005

Lin, Chi-Hsu
US Patent Application 10/628257; 20050025643
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050025643

Piezoelectric actuator module, motor module and apparatus
patent-application, April 2005

Zakoji, Makoto
US Patent Application 10/916639; 20050082950
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050082950

Method and device for injecting at least one product in an egg for treating the embryo
patent-application, June 2005

Breuil, Jean-Pierre; Breuil, Vivenne
US Patent Application 10/975390; 20050132964
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050132964

Method of making photolithographically-patterned out-of-plane coil structures
patent-application, December 2005

Chua, Christopher L.; Lemmi, Francesco; Van Schuylenbergh, Koenraad F.
US Patent Application 11/197675; 20050270135
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050270135

Pagewidth inkjet printhead assembly with longitudinally extending sets of nozzles
patent-application, May 2006

Silverbrook, Kia
US Patent Application 11/315357; 20060098047
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060098047

MEMS Release Methods
patent-application, October 2006

Lazaroff, Dennis M.
US Patent Application 11/110132; 20060234412
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060234412

Assembly Process for Out-of-Plane MEMS and Three-Axis Sensors
patent-application, April 2007

Eklund, E. Jesper; Shkel, Andrei M.
US Patent Application 11/541072; 20070087474
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070087474

Self-assembling mems devices having thermal actuation
patent-application, May 2007

Fedder, Gary K.; Oz, Altug
US Patent Application 10/558469; 20070103029
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070103029

Method and Structure for an Out-of-Plane Compliant Micro Actuator
patent-application, May 2007

Yang, Xiao
US Patent Application 11/555063; 20070103264
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070103264

Use of magnetic beads for tissue DNA extraction and IS6110 Mycobacterium tuberculosis PCR
journal, June 1999

Caldarelli-Stefano, R.; Vago, L.; Bonetto, S.
Molecular Pathology, Vol. 52, Issue 3
https://doi.org/10.1136/mp.52.3.158

Tensile Strength of Cell Walls of Living Cells
journal, October 1985

Carpita, Nicholas C.
Plant Physiology, Vol. 79, Issue 2
https://doi.org/10.1104/pp.79.2.485

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection
journal, January 2001

Choi, Jin-Woo; Oh, Kwang W.; Han, Arum
Biomedical Microdevices, Vol. 3, Issue 3, p. 191-200
https://doi.org/10.1023/A:1011490627871

Compact and precise positioner based on the Inchworm principle
journal, November 2000

Cusin, Pierre; Sawai, Takuhiko; Konishi, Satoshi
Journal of Micromechanics and Microengineering, Vol. 10, Issue 4
https://doi.org/10.1088/0960-1317/10/4/305

Out-of-plane rotary micromirrors for reconfigurable photonic applications
conference, January 2003

Dagel, Daryl J.; Blum Spahn, Olga; Allen, James J.
Micromachining and Microfabrication, SPIE Proceedings
https://doi.org/10.1117/12.472904

Magnetic bead handling on-chip: new opportunities for analytical applications
journal, October 2004

Gijs, Martin A. M.
Microfluidics and Nanofluidics
https://doi.org/10.1007/s10404-004-0010-y

A 64-site multishank CMOS low-profile neural stimulating probe
journal, January 1996

Changhyun Kim, ; Wise, K. D.
IEEE Journal of Solid-State Circuits, Vol. 31, Issue 9
https://doi.org/10.1109/4.535406

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion
journal, January 2006

Konishi, Satoshi; Oshima, Akiyoshi; Kinoshita, Nobuhito
IEEJ Transactions on Industry Applications, Vol. 126, Issue 10
https://doi.org/10.1541/ieejias.126.1325

Regeneration microelectrode array for peripheral nerve recording and stimulation
journal, September 1992

Kovacs, G. T. A.; Storment, C. W.; Rosen, J. M.
IEEE Transactions on Biomedical Engineering, Vol. 39, Issue 9, p. 893-902
https://doi.org/10.1109/10.256422

Out of plane motion of assembled microstructures using a single-mask SOI process
conference, January 2005

Last, M.; Subramaniam, V.; Pister, K. S. J.
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
https://doi.org/10.1109/SENSOR.2005.1496509

Manipulation of biological cells using a microelectromagnet matrix
journal, August 2004

Lee, H.; Purdon, A. M.; Westervelt, R. M.
Applied Physics Letters, Vol. 85, Issue 6
https://doi.org/10.1063/1.1776339

Electrostatic microactuators with integrated gear linkages for mechanical power transmission
conference, January 1996

Legtenberg, R.; Berenschot, E.; Elwenspoek, M.
Proceedings of Ninth International Workshop on Micro Electromechanical Systems
https://doi.org/10.1109/MEMSYS.1996.493854

A finite element model of cell deformation during magnetic bead twisting
journal, October 2002

Mijailovich, Srboljub M.; Kojic, Milos; Zivkovic, Miroslav
Journal of Applied Physiology, Vol. 93, Issue 4
https://doi.org/10.1152/japplphysiol.00255.2002

Laterally actuated torsional micromirrors for large static deflection
journal, February 2003

Milanovic, V.; Last, M.; Pister, K. S. J.
IEEE Photonics Technology Letters, Vol. 15, Issue 2
https://doi.org/10.1109/LPT.2002.806085

Solid-state microsensors for cortical nerve recordings
journal, July 1994

Najafi, K.
IEEE Engineering in Medicine and Biology Magazine, Vol. 13, Issue 3
https://doi.org/10.1109/51.294009

Device transplant of optical MEMS for out of plane beam steering
conference, January 2001

Nguyen, H.; Su, J. G. -D.; Toshiyoshi, H.
Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
https://doi.org/10.1109/MEMSYS.2001.906544

Development of surface micromachining technologies for microfluidics and bioMEMS
conference, September 2001

Okandan, Murat; Galambos, Paul; Mani, Sita S.
Micromachining and Microfabrication, SPIE Proceedings
https://doi.org/10.1117/12.443052

Micro and Mesoscale Robotic Assembly
journal, January 2004

Popa, Dan O.; Stephanou, Harry E.
Journal of Manufacturing Processes, Vol. 6, Issue 1, p. 52-71
https://doi.org/10.1016/S1526-6125(04)70059-6

Applications of MEMS in Surgery
journal, January 2004

Rebello, K. J.
Proceedings of the IEEE, Vol. 92, Issue 1
https://doi.org/10.1109/JPROC.2003.820536

A long-term in vitro silicon-based microelectrode-neuron connection
journal, January 1988

Regehr, W. G.; Pine, J.; Rutledge, D. B.
IEEE Transactions on Biomedical Engineering, Vol. 35, Issue 12
https://doi.org/10.1109/10.8687

A Novel Type of Mechanical Power Transmission Array for Switching Densely – Arrayed Actuator Systems
conference, January 2006

Sasaki, H.; Shikida, M.; Sato, K.
19th IEEE International Conference on Micro Electro Mechanical Systems
https://doi.org/10.1109/MEMSYS.2006.1627918

Direct mechanical measurements of the elasticity of single DNA molecules by using magnetic beads
journal, November 1992

Smith, S.; Finzi, L.; Bustamante, C.
Science, Vol. 258, Issue 5085
https://doi.org/10.1126/science.1439819

An Application Of Mechanical Leverage To Microactuation
conference, January 1995

Smegowski, J. J.; Smith, C.
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
https://doi.org/10.1109/SENSOR.1995.721822

Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots
conference, January 2004

Szabo, F. R.; Kladitis, P. E.
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
https://doi.org/10.1109/ICMENS.2004.1508992

Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope
conference, January 2003

Yang, Eui-Hyeok; Dekany, Richard G.; Padin, Stephen
Micromachining and Microfabrication, SPIE Proceedings
https://doi.org/10.1117/12.476282

Single mask, large force, and large displacement electrostatic linear inchworm motors
journal, August 2002

Yeh, R.; Hollar, S.; Pister, K. S. J.
Journal of Microelectromechanical Systems, Vol. 11, Issue 4
https://doi.org/10.1109/JMEMS.2002.800937

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Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anodemore » « less
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Method for fabricating arrays of micro-needles

Patent Kenney, Christopher J.

An array of micro-needles is created by forming an array pattern on the upper surface of a silicon wafer and etching through openings in the pattern to define micro-needle sized cavities having a desired depth. The mold thus formed may be filled with electrically conductive material, after which a desired fraction of the silicon wafer bulk is removed from the bottom-up by etching, to expose an array of projecting micro-needles. The mold may instead be filled with a flexible material to form a substrate useful in gene cell probing. An array of hollow micro-needles may be formed by coating themore » « less
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Title: Method of fabricating a micro machine

Abstract

Citation Formats

Remote Control Valve Operator patent, September 1961

Monitoring Devices for Detecting Fission Products in a Gaseous Stream patent, June 1964

Cassette tape recorder patent, February 1979

Direct current micromotor patent, April 1982

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train patent, January 1984

Rotary, vertical-drive, tethered micromotor patent, February 1993

Shaft support assembly for use in a polygon mirror drive motor patent, October 1993

Cooling microfan arrangements and process patent, March 1994

Stirring device patent, September 1995

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process patent, May 1997

Fully integrated magnetic micromotors and methods for their fabrication patent, January 1998

Process to destroy biological activity in protein-containing feed patent, July 1998

Micro-turbo generator device patent, February 1999

Microelectromechanical reciprocating-tooth indexing apparatus patent, September 1999

Compliant displacement-multiplying apparatus for microelectromechanical systems patent, January 2001

Micromotor and micropump patent, January 2001

Microelectromechanical ratcheting apparatus patent, April 2001

Floating brush seal patent, June 2001

Microelectromechanical ratcheting apparatus patent, November 2001

Mems magnetically actuated switches and associated switching arrays patent, April 2002

Microturbomachinery patent, May 2002

Shaft sealing assembly having replaceable sealing sleeve patent, September 2003

Low cost integrated out-of-plane micro-device structures and method of making patent, December 2003

Method of forming an out-of-plane structure patent, February 2005

Erected mirror optical switch patent, June 2005

Photolithographically-patterned variable capacitor structures and method of making patent, July 2005

System and method for handling microcomponent parts for performing assembly of micro-devices patent, December 2005

Piezoelectric motors and motor driving configurations patent, December 2005

Method for assembly of complementary-shaped receptacle site and device microstructures patent, March 2006

Sockets for microassembly patent, April 2006

Microstructures using carbon fiber composite honeycomb beams patent, May 2006

Microassembly and method for using same patent, May 2006

Method of manufacturing a microcomponent assembly patent, August 2006

Piezoelectric actuator, timepiece, and electronic device patent, September 2006

Magnetically-coupled actuating valve assembly patent, January 2007

Positioning device for microscopic motion patent, March 2007

Coupled drive multi-position fluid valve apparatus and method patent, April 2007

Modular manipulation system for manipulating a sample under study with a microscope patent, May 2007

Drive apparatus and device with same patent, May 2008

Sealed mover assembly patent, September 2008

MEMS micromotor and timepiece equipped with this micromotor patent, March 2009

Method of appraising and insuring intellectual property patent, May 2009

Drive device, particularly for a clockwork mechanism patent, December 2009

Method for assembling precision miniature bearings for minisystems and microsystems patent, April 2010

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly patent-application, April 2002

Bi-directional micromechanical latching linear actuator patent-application, December 2002

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices patent-application, October 2003

Low cost integrated out-of-plane micro-device structures and method of making patent-application,

MEMS based motor patent-application, June 2004

Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems patent-application, July 2004

Sealed Mover Assembly patent-application, January 2005

Oil-retaining structure for fan patent-application, February 2005

Piezoelectric actuator module, motor module and apparatus patent-application, April 2005

Method and device for injecting at least one product in an egg for treating the embryo patent-application, June 2005

Method of making photolithographically-patterned out-of-plane coil structures patent-application, December 2005

Pagewidth inkjet printhead assembly with longitudinally extending sets of nozzles patent-application, May 2006

MEMS Release Methods patent-application, October 2006

Assembly Process for Out-of-Plane MEMS and Three-Axis Sensors patent-application, April 2007

Self-assembling mems devices having thermal actuation patent-application, May 2007

Method and Structure for an Out-of-Plane Compliant Micro Actuator patent-application, May 2007

Use of magnetic beads for tissue DNA extraction and IS6110 Mycobacterium tuberculosis PCR journal, June 1999

Tensile Strength of Cell Walls of Living Cells journal, October 1985

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection journal, January 2001

Compact and precise positioner based on the Inchworm principle journal, November 2000

Out-of-plane rotary micromirrors for reconfigurable photonic applications conference, January 2003

Magnetic bead handling on-chip: new opportunities for analytical applications journal, October 2004

A 64-site multishank CMOS low-profile neural stimulating probe journal, January 1996

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion journal, January 2006

Regeneration microelectrode array for peripheral nerve recording and stimulation journal, September 1992

Out of plane motion of assembled microstructures using a single-mask SOI process conference, January 2005

Manipulation of biological cells using a microelectromagnet matrix journal, August 2004

Electrostatic microactuators with integrated gear linkages for mechanical power transmission conference, January 1996

A finite element model of cell deformation during magnetic bead twisting journal, October 2002

Laterally actuated torsional micromirrors for large static deflection journal, February 2003

Solid-state microsensors for cortical nerve recordings journal, July 1994

Device transplant of optical MEMS for out of plane beam steering conference, January 2001

Development of surface micromachining technologies for microfluidics and bioMEMS conference, September 2001

Remote Control Valve Operator
patent, September 1961

Monitoring Devices for Detecting Fission Products in a Gaseous Stream
patent, June 1964

Cassette tape recorder
patent, February 1979

Direct current micromotor
patent, April 1982

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train
patent, January 1984

Rotary, vertical-drive, tethered micromotor
patent, February 1993

Shaft support assembly for use in a polygon mirror drive motor
patent, October 1993

Cooling microfan arrangements and process
patent, March 1994

Stirring device
patent, September 1995

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
patent, May 1997

Fully integrated magnetic micromotors and methods for their fabrication
patent, January 1998

Process to destroy biological activity in protein-containing feed
patent, July 1998

Micro-turbo generator device
patent, February 1999

Microelectromechanical reciprocating-tooth indexing apparatus
patent, September 1999

Compliant displacement-multiplying apparatus for microelectromechanical systems
patent, January 2001

Micromotor and micropump
patent, January 2001

Microelectromechanical ratcheting apparatus
patent, April 2001

Floating brush seal
patent, June 2001

Microelectromechanical ratcheting apparatus
patent, November 2001

Mems magnetically actuated switches and associated switching arrays
patent, April 2002

Microturbomachinery
patent, May 2002

Shaft sealing assembly having replaceable sealing sleeve
patent, September 2003

Low cost integrated out-of-plane micro-device structures and method of making
patent, December 2003

Method of forming an out-of-plane structure
patent, February 2005

Erected mirror optical switch
patent, June 2005

Photolithographically-patterned variable capacitor structures and method of making
patent, July 2005

System and method for handling microcomponent parts for performing assembly of micro-devices
patent, December 2005

Piezoelectric motors and motor driving configurations
patent, December 2005

Method for assembly of complementary-shaped receptacle site and device microstructures
patent, March 2006

Sockets for microassembly
patent, April 2006

Microstructures using carbon fiber composite honeycomb beams
patent, May 2006

Microassembly and method for using same
patent, May 2006

Method of manufacturing a microcomponent assembly
patent, August 2006

Piezoelectric actuator, timepiece, and electronic device
patent, September 2006

Magnetically-coupled actuating valve assembly
patent, January 2007

Positioning device for microscopic motion
patent, March 2007

Coupled drive multi-position fluid valve apparatus and method
patent, April 2007

Modular manipulation system for manipulating a sample under study with a microscope
patent, May 2007

Drive apparatus and device with same
patent, May 2008

Sealed mover assembly
patent, September 2008

MEMS micromotor and timepiece equipped with this micromotor
patent, March 2009

Method of appraising and insuring intellectual property
patent, May 2009

Drive device, particularly for a clockwork mechanism
patent, December 2009

Method for assembling precision miniature bearings for minisystems and microsystems
patent, April 2010

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
patent-application, April 2002

Bi-directional micromechanical latching linear actuator
patent-application, December 2002

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
patent-application, October 2003

Low cost integrated out-of-plane micro-device structures and method of making
patent-application,

MEMS based motor
patent-application, June 2004

Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems
patent-application, July 2004

Sealed Mover Assembly
patent-application, January 2005

Oil-retaining structure for fan
patent-application, February 2005

Piezoelectric actuator module, motor module and apparatus
patent-application, April 2005

Method and device for injecting at least one product in an egg for treating the embryo
patent-application, June 2005

Method of making photolithographically-patterned out-of-plane coil structures
patent-application, December 2005

Pagewidth inkjet printhead assembly with longitudinally extending sets of nozzles
patent-application, May 2006

MEMS Release Methods
patent-application, October 2006

Assembly Process for Out-of-Plane MEMS and Three-Axis Sensors
patent-application, April 2007

Self-assembling mems devices having thermal actuation
patent-application, May 2007

Method and Structure for an Out-of-Plane Compliant Micro Actuator
patent-application, May 2007

Use of magnetic beads for tissue DNA extraction and IS6110 Mycobacterium tuberculosis PCR
journal, June 1999

Tensile Strength of Cell Walls of Living Cells
journal, October 1985

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection
journal, January 2001

Compact and precise positioner based on the Inchworm principle
journal, November 2000

Out-of-plane rotary micromirrors for reconfigurable photonic applications
conference, January 2003

Magnetic bead handling on-chip: new opportunities for analytical applications
journal, October 2004

A 64-site multishank CMOS low-profile neural stimulating probe
journal, January 1996

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion
journal, January 2006

Regeneration microelectrode array for peripheral nerve recording and stimulation
journal, September 1992

Out of plane motion of assembled microstructures using a single-mask SOI process
conference, January 2005

Manipulation of biological cells using a microelectromagnet matrix
journal, August 2004

Electrostatic microactuators with integrated gear linkages for mechanical power transmission
conference, January 1996

A finite element model of cell deformation during magnetic bead twisting
journal, October 2002

Laterally actuated torsional micromirrors for large static deflection
journal, February 2003

Solid-state microsensors for cortical nerve recordings
journal, July 1994

Device transplant of optical MEMS for out of plane beam steering
conference, January 2001

Development of surface micromachining technologies for microfluidics and bioMEMS
conference, September 2001

Micro and Mesoscale Robotic Assembly
journal, January 2004

Applications of MEMS in Surgery
journal, January 2004

A long-term in vitro silicon-based microelectrode-neuron connection
journal, January 1988