Fabricating solar cells with silicon nanoparticles

Loscutoff, Paul; Molesa, Steve; Kim, Taeseok

Title: Fabricating solar cells with silicon nanoparticles

Abstract

A laser contact process is employed to form contact holes to emitters of a solar cell. Doped silicon nanoparticles are formed over a substrate of the solar cell. The surface of individual or clusters of silicon nanoparticles is coated with a nanoparticle passivation film. Contact holes to emitters of the solar cell are formed by impinging a laser beam on the passivated silicon nanoparticles. For example, the laser contact process may be a laser ablation process. In that case, the emitters may be formed by diffusing dopants from the silicon nanoparticles prior to forming the contact holes to the emitters. As another example, the laser contact process may be a laser melting process whereby portions of the silicon nanoparticles are melted to form the emitters and contact holes to the emitters.

Inventors:: Loscutoff, Paul; Molesa, Steve; Kim, Taeseok

Issue Date:: Tue Sep 02 00:00:00 EDT 2014

Research Org.:: SunPower Corporation, San Jose, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1154931

Patent Number(s):: 8822262

Application Number:: 13/335,550

Assignee:: SunPower Corporation (San Jose, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y30/00 - Nanotechnology for materials or surface science, e.g. nanocomposites

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/02167 - {for solar cells}
H01L31/022458 - {for emitter wrap-through [EWT] type solar cells, e.g. interdigitated emitter-base back-contacts}
H01L31/03682 - {including only elements of Group IV of the Periodic System}
H01L31/03845 - {comprising semiconductor nanoparticles embedded in a semiconductor matrix
H01L31/18 - Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/546 - Polycrystalline silicon PV cells

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DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY

Citation Formats


                    Loscutoff, Paul, Molesa, Steve, and Kim, Taeseok. Fabricating solar cells with silicon nanoparticles.  United States: N. p., 2014. 
        Web.

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                    Loscutoff, Paul, Molesa, Steve, & Kim, Taeseok. Fabricating solar cells with silicon nanoparticles.  United States.

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                    Loscutoff, Paul, Molesa, Steve, and Kim, Taeseok. Tue .  
        "Fabricating solar cells with silicon nanoparticles".  United States.  https://www.osti.gov/servlets/purl/1154931.

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@article{osti_1154931,

  title        = {Fabricating solar cells with silicon nanoparticles},

  author       = {Loscutoff, Paul and Molesa, Steve and Kim, Taeseok},

  abstractNote = {A laser contact process is employed to form contact holes to emitters of a solar cell. Doped silicon nanoparticles are formed over a substrate of the solar cell. The surface of individual or clusters of silicon nanoparticles is coated with a nanoparticle passivation film. Contact holes to emitters of the solar cell are formed by impinging a laser beam on the passivated silicon nanoparticles. For example, the laser contact process may be a laser ablation process. In that case, the emitters may be formed by diffusing dopants from the silicon nanoparticles prior to forming the contact holes to the emitters. As another example, the laser contact process may be a laser melting process whereby portions of the silicon nanoparticles are melted to form the emitters and contact holes to the emitters.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 02 00:00:00 EDT 2014},

  month        = {Tue Sep 02 00:00:00 EDT 2014}

}

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Hybrid Polysilicon Heterojunction Back Contact Cell
patent-application, June 2013

Cousins, Peter J.; Smith, David D.; Rim, Seung B.
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A flat-plate concentrator: micro-concentrator design overview
conference, January 2000

Mulligan, W. P.; Terao, A.; Daroczi, S. G.
28th IEEE Photovoltaic Specialists Conference, Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036)
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Development of chip-size silicon solar cells
conference, January 2000

Mulligan, W. P.; Terao, A.; Smith, D. D.
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A mirror-less design for micro-concentrator modules
conference, January 2000

Terao, A.; Mulligan, W. P.; Daroczi, S. G.
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The promise of concentrators
journal, January 2000

Swanson, Richard M.
Progress in Photovoltaics: Research and Applications, Vol. 8, Issue 1, p. 93-111
https://doi.org/10.1002/(SICI)1099-159X(200001/02)8:1<93::AID-PIP303>3.0.CO;2-S

Simplified backside-contact solar cells
journal, January 1990

Sinton, R. A.; Swanson, R. M.
IEEE Transactions on Electron Devices, Vol. 37, Issue 2
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Silicon Ink high efficiency solar cells
conference, June 2009

Antoniadis, Homer
2009 34th IEEE Photovoltaic Specialists Conference (PVSC)
https://doi.org/10.1109/PVSC.2009.5411597

Alkyl-Functionalized Oxide-Free Silicon Nanoparticles: Synthesis and Optical Properties
journal, October 2008

Rosso-Vasic, Milena; Spruijt, Evan; van Lagen, Barend
Small, Vol. 4, Issue 10
https://doi.org/10.1002/smll.200800066

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Title: Fabricating solar cells with silicon nanoparticles

Abstract

Citation Formats

Temperature control system for textile tenter frame apparatus patent, June 1976

Solar battery and method of manufacture patent, March 1979

Solar cells and methods for manufacture thereof patent, March 1982

Method of fabricating back surface point contact solar cells patent, May 1990

Solar cell with trench through pn junction patent, January 1991

Radiation resistant passivation of silicon solar cells patent, July 1991

Bilevel contact solar cells patent, October 1991

Method of fabricating polysilicon emitters for solar cells patent, October 1991

Monolithic series-connected solar cells having improved cell isolation and method of making same patent, November 1992

P/N junction device having porous emitter patent, November 1994

Voltage controlled thyristor patent, November 1994

Electroluminescent laminate with thick film dielectric patent, July 1995

Photovoltaic generator with dielectric isolation and bonded, insulated wafer layers patent, August 1996

Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell patent, June 1997

Bifacial solar cell patent, September 1997

Photovoltaic device patent, April 1998

Metal oxide semiconductor controlled thyristor with an on-field effect transistor in a trench patent, July 1998

Semiconductor interconnection device with both n- and p-doped regions patent, October 1998

Front contact trenches for polycrystalline photovoltaic devices and semi-conductor devices with buried contacts patent, July 2000

Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same patent, April 2001

Method of fabricating a silicon solar cell patent, August 2001

Interconnect structure for solar cells and method of making same patent, November 2001

Edge passivated silicon solar/photo cell and method of manufacture patent, December 2001

Method of fabricating a silicon solar cell patent, January 2002

Method of fabricating a silicon solar cell patent, May 2002

Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same patent, July 2002

Method of fabricating a silicon solar cell patent, July 2002

Optimized scintillator and pixilated photodiode detector array for multi-slice CT x-ray detector using backside illumination patent, March 2004

Direct positive image photo-resist transfer of substrate design patent, March 2005

CT detector having a segmented optical coupler and method of manufacturing same patent, August 2005

Use of doped silicon dioxide in the fabrication of solar cells patent, February 2006

CT detector array having non pixelated scintillator array patent, May 2006

Fabrication methods for ultra thin back-illuminated photodiode array patent, September 2006

Use of doped silicon dioxide in the fabrication of solar cells patent, November 2006

Phosphor materials and illumination devices made therefrom patent, October 2007

Back side contact solar cell with doped polysilicon regions patent, December 2008

Methods for creating a densified group IV semiconductor nanoparticle thin film patent, April 2009

Methods for optimizing thin film formation with reactive gases patent, August 2009

Methods of forming multi-doped junctions on a substrate patent, November 2009

Methods for forming composite nanoparticle-metal metallization contacts on a substrate patent, April 2010

Solar cell having silicon nano-particle emitter patent, April 2010

Method for preparing nanoparticle thin films patent, May 2010

Solar cell having polymer heterojunction contacts patent, May 2010

Preparation of group IV semiconductor nanoparticle materials and dispersions thereof patent, June 2010

System and method for eliminating the structure and edge roughness produced during laser ablation of a material patent, June 2010

Fabrication methods of thin film transistor substrates patent, June 2010

Method of direct Coulomb explosion in laser ablation of semiconductor structures patent, July 2010

Method for manufacturing divided waveplate filter patent, August 2010

Array substrate patent, August 2010

Preventing harmful polarization of solar cells patent, August 2010

Singulating semiconductor wafers to form semiconductor chips patent, September 2010

Trench process and structure for backside contact solar cells with polysilicon doped regions patent, October 2010

Back side contact solar cell structures and fabrication processes patent, October 2010

Trench process and structure for backside contact solar cells with polysilicon doped regions patent, December 2010

Template for three-dimensional thin-film solar cell manufacturing and methods of use patent, March 2012

Methods of forming a low resistance silicon-metal contact patent, January 2013

Fast turn on/off photovoltaic generator for photovoltaic relay patent-application, June 2003

Discrete and integrated photo voltaic solar cells patent-application, July 2005

Apparatus for detecting ionizing radiation patent-application, August 2005

Process and fabrication methods for emitter wrap through back contact solar cells patent-application, March 2006

Preventing harmful polarization of solar cells patent-application, September 2006

Electrode Material, Solar Cell, And Method For Producing Solar Cell patent-application, September 2007

Solar cell with reduced base diffusion area patent-application, January 2008

Method for the Contact Separation of Electrically-Conducting Layers on the Back Contacts of Solar Cells and Corresponding Solar Cells patent-application, February 2008

High Density Photodiodes patent-application, March 2008

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Template for Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use patent-application, July 2008

Solar cell structures, photovoltaic panels and corresponding processes patent-application, August 2008

Oxynitride passivation of solar cell patent-application, October 2008

Array of small contacts for solar cell fabrication patent-application, December 2008

Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use patent-application, April 2009

Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells patent-application, June 2009

Methods of fabricating solar-cell structures and resulting solar-cell structures patent-application, July 2009

Front contact solar cell with formed emitter patent-application, August 2009

Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells patent-application, September 2009

Trench Process and Structure for Backside Contact Solar Cells with Polysilicon Doped Regions patent-application, December 2009

Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions patent-application, December 2009

Temperature control system for textile tenter frame apparatus
patent, June 1976

Solar battery and method of manufacture
patent, March 1979

Solar cells and methods for manufacture thereof
patent, March 1982

Method of fabricating back surface point contact solar cells
patent, May 1990

Solar cell with trench through pn junction
patent, January 1991

Radiation resistant passivation of silicon solar cells
patent, July 1991

Bilevel contact solar cells
patent, October 1991

Method of fabricating polysilicon emitters for solar cells
patent, October 1991

Monolithic series-connected solar cells having improved cell isolation and method of making same
patent, November 1992

P/N junction device having porous emitter
patent, November 1994

Voltage controlled thyristor
patent, November 1994

Electroluminescent laminate with thick film dielectric
patent, July 1995

Photovoltaic generator with dielectric isolation and bonded, insulated wafer layers
patent, August 1996

Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
patent, June 1997

Bifacial solar cell
patent, September 1997

Photovoltaic device
patent, April 1998

Metal oxide semiconductor controlled thyristor with an on-field effect transistor in a trench
patent, July 1998

Semiconductor interconnection device with both n- and p-doped regions
patent, October 1998

Front contact trenches for polycrystalline photovoltaic devices and semi-conductor devices with buried contacts
patent, July 2000

Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same
patent, April 2001

Method of fabricating a silicon solar cell
patent, August 2001

Interconnect structure for solar cells and method of making same
patent, November 2001

Edge passivated silicon solar/photo cell and method of manufacture
patent, December 2001

Method of fabricating a silicon solar cell
patent, January 2002

Method of fabricating a silicon solar cell
patent, May 2002

Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same
patent, July 2002

Method of fabricating a silicon solar cell
patent, July 2002

Optimized scintillator and pixilated photodiode detector array for multi-slice CT x-ray detector using backside illumination
patent, March 2004

Direct positive image photo-resist transfer of substrate design
patent, March 2005

CT detector having a segmented optical coupler and method of manufacturing same
patent, August 2005

Use of doped silicon dioxide in the fabrication of solar cells
patent, February 2006

CT detector array having non pixelated scintillator array
patent, May 2006

Fabrication methods for ultra thin back-illuminated photodiode array
patent, September 2006

Use of doped silicon dioxide in the fabrication of solar cells
patent, November 2006

Phosphor materials and illumination devices made therefrom
patent, October 2007

Back side contact solar cell with doped polysilicon regions
patent, December 2008

Methods for creating a densified group IV semiconductor nanoparticle thin film
patent, April 2009

Methods for optimizing thin film formation with reactive gases
patent, August 2009

Methods of forming multi-doped junctions on a substrate
patent, November 2009

Methods for forming composite nanoparticle-metal metallization contacts on a substrate
patent, April 2010

Solar cell having silicon nano-particle emitter
patent, April 2010

Method for preparing nanoparticle thin films
patent, May 2010

Solar cell having polymer heterojunction contacts
patent, May 2010

Preparation of group IV semiconductor nanoparticle materials and dispersions thereof
patent, June 2010

System and method for eliminating the structure and edge roughness produced during laser ablation of a material
patent, June 2010

Fabrication methods of thin film transistor substrates
patent, June 2010

Method of direct Coulomb explosion in laser ablation of semiconductor structures
patent, July 2010

Method for manufacturing divided waveplate filter
patent, August 2010

Array substrate
patent, August 2010

Preventing harmful polarization of solar cells
patent, August 2010

Singulating semiconductor wafers to form semiconductor chips
patent, September 2010

Trench process and structure for backside contact solar cells with polysilicon doped regions
patent, October 2010

Back side contact solar cell structures and fabrication processes
patent, October 2010

Trench process and structure for backside contact solar cells with polysilicon doped regions
patent, December 2010

Template for three-dimensional thin-film solar cell manufacturing and methods of use
patent, March 2012

Methods of forming a low resistance silicon-metal contact
patent, January 2013

Fast turn on/off photovoltaic generator for photovoltaic relay
patent-application, June 2003

Discrete and integrated photo voltaic solar cells
patent-application, July 2005

Apparatus for detecting ionizing radiation
patent-application, August 2005

Process and fabrication methods for emitter wrap through back contact solar cells
patent-application, March 2006

Preventing harmful polarization of solar cells
patent-application, September 2006

Electrode Material, Solar Cell, And Method For Producing Solar Cell
patent-application, September 2007

Solar cell with reduced base diffusion area
patent-application, January 2008

Method for the Contact Separation of Electrically-Conducting Layers on the Back Contacts of Solar Cells and Corresponding Solar Cells
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High Density Photodiodes
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Thin wafer detectors with improved radiation damage and crosstalk characteristics
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Solar cell structures, photovoltaic panels and corresponding processes
patent-application, August 2008

Oxynitride passivation of solar cell
patent-application, October 2008

Array of small contacts for solar cell fabrication
patent-application, December 2008

Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, April 2009

Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells
patent-application, June 2009

Methods of fabricating solar-cell structures and resulting solar-cell structures
patent-application, July 2009

Front contact solar cell with formed emitter
patent-application, August 2009

Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells
patent-application, September 2009

Trench Process and Structure for Backside Contact Solar Cells with Polysilicon Doped Regions
patent-application, December 2009

Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions
patent-application, December 2009

Generation Of Contact Masks For Inkjet Printing On Solar Cell Substrates
patent-application, March 2010

Back Contact Sliver Cells
patent-application, June 2010

Methods and Apparatus for Metallization of Solar Cells
patent-application, September 2010