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Title: Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics

Abstract

In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
; ; ; ; ; ; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1132058
Patent Number(s):
8729524
Application Number:
13/441,598
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05K - PRINTED CIRCUITS
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Rogers, John A, Meitl, Matthew, Sun, Yugang, Ko, Heung Cho, Carlson, Andrew, Choi, Won Mook, Stoykovich, Mark, Jiang, Hanqing, Huang, Yonggang, Nuzzo, Ralph G, Zhu, Zhengtao, Menard, Etienne, and Khang, Dahl-Young. Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics. United States: N. p., 2014. Web.
Rogers, John A, Meitl, Matthew, Sun, Yugang, Ko, Heung Cho, Carlson, Andrew, Choi, Won Mook, Stoykovich, Mark, Jiang, Hanqing, Huang, Yonggang, Nuzzo, Ralph G, Zhu, Zhengtao, Menard, Etienne, & Khang, Dahl-Young. Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics. United States.
Rogers, John A, Meitl, Matthew, Sun, Yugang, Ko, Heung Cho, Carlson, Andrew, Choi, Won Mook, Stoykovich, Mark, Jiang, Hanqing, Huang, Yonggang, Nuzzo, Ralph G, Zhu, Zhengtao, Menard, Etienne, and Khang, Dahl-Young. Tue . "Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics". United States. https://www.osti.gov/servlets/purl/1132058.
@article{osti_1132058,
title = {Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics},
author = {Rogers, John A and Meitl, Matthew and Sun, Yugang and Ko, Heung Cho and Carlson, Andrew and Choi, Won Mook and Stoykovich, Mark and Jiang, Hanqing and Huang, Yonggang and Nuzzo, Ralph G and Zhu, Zhengtao and Menard, Etienne and Khang, Dahl-Young},
abstractNote = {In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 20 00:00:00 EDT 2014},
month = {Tue May 20 00:00:00 EDT 2014}
}

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Nanotechnology: High-speed integrated nanowire circuits
journal, April 2005


Toward Paperlike Displays
journal, February 2001


Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002


Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
journal, October 2002


Interconnect structure for electronic devices
patent, February 2004


III–nitrides: Growth, characterization, and properties
journal, February 2000


Measurement of nanomechanical resonant structures in single-crystal silicon
journal, December 1998

  • Carr, D. W.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, p. 3821-3824
  • https://doi.org/10.1116/1.590416

Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications
journal, January 2002


Flexible a-Si:H Position-Sensitive Detectors
journal, July 2005


Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns
journal, November 2004


Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002


High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
journal, July 2005


Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates
journal, November 2006


Design and Performance of Inkjet Print Heads for Non-Graphic-Arts Applications
journal, November 2003


Inkjet Printing of Functional Materials
journal, November 2003


One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003


High-mobility polymer gate dielectric pentacene thin film transistors
journal, November 2002


Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applications
patent-application, December 2003


Holographic photonic crystals with diamond symmetry
journal, November 2003


Application of carbon nanotubes to field emission displays
journal, February 2001


Analog and digital circuits using organic thin-film transistors on polyester substrates
journal, November 2000


3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
journal, May 2001


High-κ dielectrics for advanced carbon-nanotube transistors and logic gates
journal, November 2002


A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
journal, January 2004


Extraordinary Mobility in Semiconducting Carbon Nanotubes
journal, January 2004


Collapse of stamps for soft lithography due to interfacial adhesion
journal, April 2005


Printed plastic electronics and paperlike displays
journal, August 2002


Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth
journal, December 1995


Devices and methods for pattern generation by ink lithography
patent-application, March 2008


Room-Temperature Ultraviolet Nanowire Nanolasers
journal, June 2001


Stretchable and Foldable Electronic Devices
patent-application, July 2010


Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004


Nature of electrical contacts in a metal–molecule–semiconductor system
journal, March 2003

  • Hsu, J. W. P.; Loo, Y. L.; Lang, D. V.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 4, p. 1928-1935
  • https://doi.org/10.1116/1.1588641

Mountable microstructure and optical transmission apparatus
patent, May 2004


Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes
journal, October 2004


Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films
journal, January 2002


An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
journal, May 2002


Effects of Mechanical Strain on TFTs on Spherical Domes
journal, March 2004


High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003


Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
journal, September 2001


Electrically Induced Optical Emission from a Carbon Nanotube FET
journal, May 2003


Conductor geometry for electronic circuits fabricated on flexible substrates
patent, December 2009


Stability of molded polydimethylsiloxane microstructures
journal, January 1997


Printable Semiconductor Structures and Related Methods of Making and Assembling
patent-application, February 2007


Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains
journal, October 1995


Conducting elastomer surface texturing: a path to electrode spotting
journal, September 2004


Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
journal, May 1997


Logic Circuits with Carbon Nanotube Transistors
journal, October 2001


Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors
journal, January 2005


Sharp exciton emission from single InAs quantum dots in GaAs nanowires
journal, September 2003


A review of 3-D packaging technology
journal, February 1998

  • Al-Sarawi, S. F.; Abbott, D.; Franzon, P. D.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, Vol. 21, Issue 1, p. 2-14
  • https://doi.org/10.1109/96.659500

Methods of forming two-sided HDMI interconnect structures
patent, November 1997


The path to ubiquitous and low-cost organic electronic appliances on plastic
journal, April 2004


Ge/Si nanowire heterostructures as high-performance field-effect transistors
journal, May 2006


Fabrication of a Cylindrical Display by Patterned Assembly
journal, April 2002


Effect of mismatch strain on band gap in III‐V semiconductors
journal, June 1985


Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles
journal, November 2002


Control of Si Nanowire Growth by Oxygen
journal, June 2006


Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems
journal, September 2003


Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors
journal, September 2005


Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays
journal, December 2000


Electric microcontact printing method and apparatus
patent-application, September 2003


Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits
journal, January 2005


Angular displacement sensors
patent, February 1992


Methods for forming assemblies
patent, August 2001


Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
journal, April 2006


Methods and apparatus for fluidic self assembly
patent, September 2003


Apparatuses and methods used in forming assemblies
patent, August 2001


Stretchable and elastic interconnects
patent-application, September 2004


Organic species that facilitate charge transfer to or from nanostructures
patent, September 2005


High-mobility ultrathin semiconducting films prepared by spin coating
journal, March 2004


Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature
journal, February 2005


Testing integrated circuit dice
patent, April 2002


Flexural rigidity of microtubules measured with the use of optical tweezers
journal, February 1996


Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure
journal, December 2002


Improved Pattern Transfer in Soft Lithography Using Composite Stamps
journal, June 2002


Methods to fabricate thin film transistors and circuits
patent, May 2001


III–V micromachined devices for microsystems
journal, September 1998


Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
journal, April 2002


Compliant thin film patterns of stiff materials as platforms for stretchable electronics
journal, December 2005


Surface-induced structure formation of polymer blends on patterned substrates
journal, February 1998


Silicon for thin-film transistors
journal, April 2003


Methods and devices for fabricating three-dimensional nanoscale structures
patent-application, December 2006


Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors
journal, October 1999


Applications
book, January 1991


Stretchable gold conductors on elastomeric substrates
journal, April 2003


Semiconductor device and method of manufacturing the same
patent-application, May 2003


Nanoribbon Waveguides for Subwavelength Photonics Integration
journal, August 2004


Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp
patent-application, August 2009


Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire
journal, April 2005


Method and apparatus for transferring blocks
patent, May 2004


Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
patent-application, June 2004


The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors
journal, July 2005


Direct-connect signaling system
patent-application, December 2003


Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
journal, May 2006


Electronic skin: architecture and components
journal, November 2004


Large area, high resolution, dry printing of conducting polymers for organic electronics
journal, January 2003


Controlled buckling of semiconductor nanoribbons for stretchable electronics
journal, December 2006


Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces
journal, October 2005


Flexible display designed for minimal mechanical strain
patent-application, June 2006


Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
journal, March 2003


On-chip natural assembly of silicon photonic bandgap crystals
journal, November 2001


Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004


Field emission from carbon nanotubes for displays
journal, April 2000


Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners
journal, November 2005


Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994


Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
journal, October 1998


Patterning Self-Assembled Monolayers: Applications in Materials Science
journal, May 1994


An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
journal, July 1992


Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly
journal, August 2005


Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003


Ballistic carbon nanotube field-effect transistors
journal, August 2003


Multispectral Plasmonic Crystal Sensors
patent-application, September 2008


The Adhesion Between Polymers
journal, August 1991


Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components
patent-application, May 2008


Field-Effect Mobility of Organic Polymer Thin-Film Transistors
journal, October 2004


Electrospinning of Nanofibers: Reinventing the Wheel?
journal, July 2004


Ordering of Spontaneously Formed Buckles on Planar Surfaces
journal, April 2000


Patterning organic–inorganic thin-film transistors using microcontact printed templates
journal, November 2001


Transfer printing by kinetic control of adhesion to an elastomeric stamp
journal, December 2005


Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
journal, August 2004

  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903
  • https://doi.org/10.1021/ja047451u

Methods of positioning and/or orienting nanostructures
patent, March 2005


Mold release layer transferring film and laminate film
patent, August 2007


Nanowire Arrays Defined by Nanoimprint Lithography
journal, April 2004


Large Area Submicrometer Contact Printing Using a Contact Aligner
journal, June 2000


The mechanics of electronic materials
journal, September 1999


Large area solar cell extended life interconnect
patent, November 2000


An improved GaAs device model for the simulation of analog integrated circuit
journal, May 2003


Nanowire heterostructures for encoding information
patent-application, February 2004


An analytical back-gate bias effect model for ultrathin SOI CMOS devices
journal, April 1993


Nanoimprint lithography
patent, June 1998


Chemical Etching of InGaAsP/InP DH Wafer
journal, January 1982


Cheap and cheerful circuits
journal, September 2000


InGaN nanorings and nanodots by selective area epitaxy
journal, October 2005


Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
journal, June 2002


Nanostructured advanced materials. Perspectives and directions
journal, January 2002


Plastic Electronics and Their Packaging Technologies
journal, April 2003


An elastomeric conductor based on polyaniline prepared by mechanical mixing
journal, September 1999


Macroelectronics: Perspectives on Technology and Applications
journal, July 2005


A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998


Printing Patterns of Proteins
journal, April 1998


Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


Low-voltage organic transistors with an amorphous molecular gate dielectric
journal, October 2004


Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
journal, January 1989


Amorphous Si TFTs on plastically deformed spherical domes
journal, April 2002


Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers
journal, October 2006


Method of making thin silicon sheets for solar cells
patent, January 2007


Screen printing for the fabrication of organic light-emitting devices
journal, January 2001


Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
journal, May 2004


Nanobelts of Semiconducting Oxides
journal, March 2001


Silicon motherboards for multichannel optical modules
journal, March 1996

  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40
  • https://doi.org/10.1109/95.486559

Preparation of Macroporous Metal Films from Colloidal Crystals
journal, September 1999


Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997


Directed Assembly of One-Dimensional Nanostructures into Functional Networks
journal, January 2001


Mesoscale organization of metal nanocrystals
journal, January 2002


High Performance Electrolyte Gated Carbon Nanotube Transistors
journal, August 2002


Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation
journal, January 2003


Low-voltage and high-field-effect mobility organic transistors with a polymer insulator
journal, February 2006


Invention of the integrated circuit
journal, July 1976


Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates
journal, November 2004


Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
journal, February 2004


Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning
patent-application, January 2003


Web fabrication of devices
patent, January 2004


Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
journal, August 2004


High-performance all-polymer integrated circuits
journal, September 2000


Thin-Film Transistors
book, February 2003


Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
journal, September 1998


Printable Semiconductor Structures and Related Methods of Making and Assembling
patent-application, November 2010


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy
journal, March 2004


Contact Electrification and Adhesion Between Dissimilar Materials
journal, April 1992


High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
journal, January 1995


Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown
journal, April 2001


Finer features for functional microdevices
journal, August 2001


Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes
journal, July 2002


Nanocomposites
patent-application, May 2004


Manufacturing method for electric device
patent-application, April 2004


Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays
journal, April 1997


Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
journal, August 2001


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


Deformable organic devices
patent-application, October 2005


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


Semiconductor nanowires for novel one-dimensional devices
journal, March 2004


Surface mountable flexible interconnect
patent, July 1999


The Incredible Shrinking Circuit
journal, September 2001


Semiconductor Clusters, Nanocrystals, and Quantum Dots
journal, February 1996


Optical Systems Fabricated by Printing-based Assembly
patent-application, November 2010


Apparatus relating to block configurations and fluidic self-assembly processes
patent, December 2003


Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors
journal, March 2001


Oriented nanostructures and methods of preparing
patent-application, July 2004


High-Resolution Contact Printing with Dendrimers
journal, April 2002


Amorphous silicon technology for large area digital X-ray and optical imaging
journal, April 2002


Some properties of spherical and rod-shaped semiconductor and metal nanocrystals
journal, January 2002


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


Biological applications of high aspect ratio nanoparticles
journal, January 2004


Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Composite patterning devices for soft lithography
patent, March 2007


Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile
journal, June 2003


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
journal, December 2000


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


Conversion of Zinc Oxide Nanobelts into Superlattice-Structured Nanohelices
journal, September 2005


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000