Low temperature junction growth using hot-wire chemical vapor deposition
Abstract
A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1118271
- Patent Number(s):
- 8642450
- Application Number:
- 12/742,001
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC36-99GO10337
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2007 Nov 09
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY
Citation Formats
Wang, Qi, Page, Matthew, Iwaniczko, Eugene, Wang, Tihu, and Yan, Yanfa. Low temperature junction growth using hot-wire chemical vapor deposition. United States: N. p., 2014.
Web.
Wang, Qi, Page, Matthew, Iwaniczko, Eugene, Wang, Tihu, & Yan, Yanfa. Low temperature junction growth using hot-wire chemical vapor deposition. United States.
Wang, Qi, Page, Matthew, Iwaniczko, Eugene, Wang, Tihu, and Yan, Yanfa. Tue .
"Low temperature junction growth using hot-wire chemical vapor deposition". United States. https://www.osti.gov/servlets/purl/1118271.
@article{osti_1118271,
title = {Low temperature junction growth using hot-wire chemical vapor deposition},
author = {Wang, Qi and Page, Matthew and Iwaniczko, Eugene and Wang, Tihu and Yan, Yanfa},
abstractNote = {A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 04 00:00:00 EST 2014},
month = {Tue Feb 04 00:00:00 EST 2014}
}
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