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Title: Method and system for high power reflective optical elements

Abstract

A method of repairing damage in an optical element includes providing a laser system including at least one optical element having a coating layer having an incident light surface and directing a laser pulse from the laser system to impinge on the incident light surface. The method also includes sustaining damage to a portion of the incident light surface and melting the damaged portion of the incident light surface and a region adjacent to the damaged portion. The method further includes flowing material from the region adjacent the damaged portion to the damaged portion and solidifying the material in the damaged portion and the region adjacent to the damaged portion.

Inventors:
; ;
Issue Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1083050
Patent Number(s):
8395079
Application Number:
12/834,706
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Demos, Stavros G., Rubenchik, Alexander M., and Negres, Raluca A. Method and system for high power reflective optical elements. United States: N. p., 2013. Web.
Demos, Stavros G., Rubenchik, Alexander M., & Negres, Raluca A. Method and system for high power reflective optical elements. United States.
Demos, Stavros G., Rubenchik, Alexander M., and Negres, Raluca A. Tue . "Method and system for high power reflective optical elements". United States. https://www.osti.gov/servlets/purl/1083050.
@article{osti_1083050,
title = {Method and system for high power reflective optical elements},
author = {Demos, Stavros G. and Rubenchik, Alexander M. and Negres, Raluca A.},
abstractNote = {A method of repairing damage in an optical element includes providing a laser system including at least one optical element having a coating layer having an incident light surface and directing a laser pulse from the laser system to impinge on the incident light surface. The method also includes sustaining damage to a portion of the incident light surface and melting the damaged portion of the incident light surface and a region adjacent to the damaged portion. The method further includes flowing material from the region adjacent the damaged portion to the damaged portion and solidifying the material in the damaged portion and the region adjacent to the damaged portion.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 12 00:00:00 EDT 2013},
month = {Tue Mar 12 00:00:00 EDT 2013}
}

Works referenced in this record:

Q-switched frequency-doubled Nd:YAG laser surface finishing of metals
journal, January 1983


Radiation system and lithographic apparatus
patent, June 2007


Method and Apparatus for Repair of Reflective Photomasks
patent-application, November 2006


Laser planarization of nonrefractory metal during integrated circuit fabrication
patent, July 1988


LPP EUV light source drive laser system
patent, January 2009