Mesoscale hybrid calibration artifact

Tran, Hy D; Claudet, Andre A; Oliver, Andrew D

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Title: Mesoscale hybrid calibration artifact

Abstract

A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.

Inventors:

Tran, Hy D ^[1]; Claudet, Andre A ^[1]; Oliver, Andrew D ^[2]

Albuquerque, NM
Waltham, MA

Issue Date:: Tue Sep 07 00:00:00 EDT 2010

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1014662

Patent Number(s):: 7788818

Application Number:: US Patent Application 11/866,177

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B21/042 - {Calibration or calibration artifacts
G01B3/30 - Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Tran, Hy D, Claudet, Andre A, and Oliver, Andrew D. Mesoscale hybrid calibration artifact.  United States: N. p., 2010. 
        Web.

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                    Tran, Hy D, Claudet, Andre A, & Oliver, Andrew D. Mesoscale hybrid calibration artifact.  United States.

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                    Tran, Hy D, Claudet, Andre A, and Oliver, Andrew D. Tue .  
        "Mesoscale hybrid calibration artifact".  United States.  https://www.osti.gov/servlets/purl/1014662.

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@article{osti_1014662,

  title        = {Mesoscale hybrid calibration artifact},

  author       = {Tran, Hy D and Claudet, Andre A and Oliver, Andrew D},

  abstractNote = {A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 07 00:00:00 EDT 2010},

  month        = {Tue Sep 07 00:00:00 EDT 2010}

}

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Works referenced in this record:

Grid plate calibration at the National Bureau of Standards
journal, January 1988

Doiron, T. D.
Journal of Research of the National Bureau of Standards, Vol. 93, Issue 1
https://doi.org/10.6028/jres.093.005

Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring
journal, April 2005

Aigeldinger, G.; Ceremuga, J. T.; Skala, D. M.
Microsystem Technologies, Vol. 11, Issue 4-5
https://doi.org/10.1007/s00542-004-0449-5

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Title: Mesoscale hybrid calibration artifact

Abstract

Citation Formats

Grid plate calibration at the National Bureau of Standards journal, January 1988

Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring journal, April 2005

Grid plate calibration at the National Bureau of Standards
journal, January 1988

Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring
journal, April 2005