Development, characterization and experimental performance of x-ray optics for the LCLS free-electron laser
This manuscript discusses the development of reflective optics for the x-ray offset mirror systems of the Linac Coherent Light Source (LCLS), a 0.15-1.5 nm free-electron laser (FEL) at the Stanford Linear Accelerator Center (SLAC). The unique properties (such as the high peak brightness) of the LCLS FEL beam translate to strict limits in terms of materials choice, thus leading to an x-ray mirror design consisting of a reflective coating deposited on a silicon substrate. Furthermore, the physics requirements for these mirrors result in stringent surface figure and finish specifications that challenge the state-of-the-art in x-ray substrate manufacturing, thin film deposition, and metrology capabilities. Recent experimental results on the development, optimization, and characterization of the LCLS soft x-ray mirrors are presented in this manuscript, including: precision surface metrology on the silicon substrates, and the development of boron carbide reflective coatings with reduced stress and thickness variation < 0.14 nm rms across the 175-mm clear aperture area of the LCLS soft x-ray mirrors.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 945630
- Report Number(s):
- LLNL-CONF-407188; TRN: US0901034
- Resource Relation:
- Journal Volume: 7077; Conference: Presented at: Advances in X-Ray/EUV Optics and Components III, part of SPIE's Optics and Photonics Meeting, San Diego, CA, United States, Aug 10 - Aug 14, 2008
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUMM MECHANICS
GENERAL PHYSICS
ACCURACY
APERTURES
BORON CARBIDES
BRIGHTNESS
DEPOSITION
FREE ELECTRON LASERS
LIGHT SOURCES
LINEAR ACCELERATORS
MANUFACTURING
MIRRORS
OPTICS
OPTIMIZATION
PHYSICS
REFLECTIVE COATINGS
SILICON
SPECIFICATIONS
SUBSTRATES
THICKNESS
THIN FILMS