Matching network for RF plasma source

Patent · Tue Nov 20 00:00:00 EST 2007

OSTI ID:919903

Pickard, Daniel S ^[1]; Leung, Ka-Ngo ^[2]

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1. Palo Alto, CA
2. Hercules, CA

A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.

• Research Organization: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC03-76SF00098
• Assignee: The Regents of the University of California (Oakland, CA)
• Patent Number(s): 7,298,091
• Application Number: 10/060,826
• OSTI ID: 919903
• Country of Publication: United States
• Language: English