Method for preventing micromechanical structures from adhering to another object

Patent · Thu Jan 01 00:00:00 EST 1998

OSTI ID:871621

Smith, James H ^[1]; Ricco, Antonio J ^[1]

---

1. Albuquerque, NM

A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.

• Research Organization: AT&T
• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5766367
• OSTI ID: 871621
• Country of Publication: United States
• Language: English

Related Subjects

method
preventing
micromechanical
structures
adhering
step
immersing
structure
associated
substrate
chemical
species
stick
employed
manufacture
prevent
sticking
surface
micromechanical structure
chemical species
substrate surface
chemical specie
micromechanical structures
associated substrate
mechanical structure
preventing micromechanical
/134/216/