.beta.-silicon carbide protective coating and method for fabricating same

Patent · Sat Jan 01 00:00:00 EST 1994

OSTI ID:869587

Carey, Paul G ^[1]; Thompson, Jesse B ^[2]

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1. Mountain View, CA
2. Brentwood, CA

A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 5360491
• OSTI ID: 869587
• Country of Publication: United States
• Language: English

Related Subjects

beta
-silicon
carbide
protective
coating
method
fabricating
polycrystalline
beta-silicon
film
forming
components
top
solar
cells
extremely
hard
surface
anti-reflective
achieved
dc
magnetron
co-sputtering
amorphous
silicon
carbon
form
sic
cell
irradiated
pulsed
energy
source
excimer
laser
synthesize
poly-
c-sic
produce
-sic
primary
application
manufacturing
wherever
requirement
reflective coating
pulsed energy
protective surface
protective coating
amorphous silicon
solar cell
silicon carbide
solar cells
energy source
excimer laser
dc magnet
dc magnetron
hard surface
-silicon carbide
anti-reflective coating
/136/204/257/427/438/