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Title: Relaxation of stresses in ta-C prepared by filtered cathodic arc deposition

Journal Article · · Journal of Applied Physics
OSTI ID:843036

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Director. Office of Science. Office of Basic Energy Sciences. Contracts DE-AC03-76SF00098 and W-7405-ENG-36
DOE Contract Number:
AC03-76SF00098
OSTI ID:
843036
Report Number(s):
LBNL-45428; JAPIAU; R&D Project: Z2C084; TRN: US0503816
Journal Information:
Journal of Applied Physics, Vol. 88, Issue 5; Other Information: Journal Publication Date: 09/01/2000; ISSN 0021-8979
Country of Publication:
United States
Language:
English

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