Heterodyne Interferometer with Angstrom-level Periodic Nonlinearity
Patent Application
·
OSTI ID:836215
Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acoustooptic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.
- Sponsoring Organization:
- US Department of Energy (US)
- Assignee:
- OSTI
- Patent Number(s):
- PATENTS-US-A6847455
- Application Number:
- Patent Application 10/254,567; DOE Case S-95244; TRN: US200509%%380
- OSTI ID:
- 836215
- Resource Relation:
- Other Information: Supercedes report DE00836215; PBD: 25 Jan 2005
- Country of Publication:
- United States
- Language:
- English
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