MOCVD of yttria stabilized zirconia on Co-Cr
- Spire Corp., Bedford, MA (United States)
- State Univ. of New York, Albany, NY (United States). Dept. of Physics
Thin films of yttria stabilized zirconia (YSZ) were deposited by metal organic chemical vapor deposition (MOCVD) on cobalt-chromium (Co-Cr) alloys used for orthopedic implants. TMHD derivatives were preferred for the metalorganic sources over the less expensive fluorinated beta-diketonates as the latter left up to 1% fluorine in the film, as determined by Auger spectroscopy. Crystalline cubic structure of these YSZ films was verified by X-ray diffraction. Columnar grain growth gave a rough surface on thicker YSZ films, which increased wear of the mating polyethylene component during simulation tests. YSZ films under one micron thick were mirror smooth and reduced wear of the polymer component by 70% compared to uncoated Co-Cr. Film adhesion was excellent.
- OSTI ID:
- 82554
- Report Number(s):
- CONF-941144-; ISBN 1-55899-264-2; TRN: IM9533%%11
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994; Other Information: PBD: 1995; Related Information: Is Part Of Chemical vapor deposition of refractory metals and ceramics III; Gallois, B.M. [ed.] [Stevens Inst. of Tech., Hoboken, NJ (United States)]; Lee, W.Y. [ed.] [Oak Ridge National Lab., TN (United States)]; Pickering, M.A. [ed.] [Morton International, Woburn, MA (United States)]; PB: 297 p.; Materials Research Society symposium proceedings, Volume 363
- Country of Publication:
- United States
- Language:
- English
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