skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Atto-wavelength, system-level flare characterization of extreme-ultraviolet (EUV) optical systems

Journal Article · · Applied Optics
OSTI ID:767555

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Director, Office of Science. Office of Basic Energy Studies (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
767555
Report Number(s):
LBNL-44480; APOPAI; R&D Project: 509201; TRN: AH200038%%134
Journal Information:
Applied Optics, Vol. 39, Issue 17; Other Information: PBD: 29 Oct 1999; ISSN 0003-6935
Country of Publication:
United States
Language:
English

Similar Records

Interferometric at-wavelength flare characterization of extreme ultraviolet optical systems
Journal Article · Mon Nov 01 00:00:00 EST 1999 · Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures · OSTI ID:767555

At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems
Journal Article · Sat Jun 10 00:00:00 EDT 2000 · Applied Optics · OSTI ID:767555

At-wavelength characterization of the extreme ultraviolet engineering test stand set-2 optic
Journal Article · Thu Nov 01 00:00:00 EST 2001 · Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures · OSTI ID:767555