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Title: Synthesis of silane and silicon in a non-equilibrium plasma jet. Second quarterly report, September 21--December 20, 1976

Technical Report ·
DOI:https://doi.org/10.2172/7294659· OSTI ID:7294659

The objective of this program is to determine the feasibility of high volume, low-cost production of high purity silane or solar grade silicon using a non-equilibrium hydrogen plasma jet. Reactions of hydrogen atoms produced in the plasma jet with chlorosilanes (added either to the discharge or to the hydrogen atom stream) are being studied. During this quarter, hydrogen atom production in the plasma jet (the sine qua non for carrying out the chemical experiments) has been investigated with 3.5 and 6.1 mm diam nozzles both as anodes and as cathodes for the glow discharge. Complete energy balance data for the discharges have been obtained at H/sub 2/ pressures of 25, 50, and 225 Torr with emphasis on the 50 Torr data. Results were sufficiently encouraging (e.g., 2.7% (vol) H atom concentrations were obtained at 30% energy conversion into H atoms) that chemical synthesis studies were begun. SiCl/sub 4/ was initially added to the discharge with H/sub 2/ and metallic deposits were formed in the discharge region. Downstream, a brown powder was formed on the reactor walls. In further work, SiCl/sub 4/ was added to the H/H/sub 2/ jet. A reaction ensued, depositing a brown powder on the reactor walls. Qualitative analytical tests of this powder are consistent with its being amorphous Si. The H/H/sub 2//SiCl/sub 4/ reaction results in a green chemiluminescence.

Research Organization:
Aerochem Research Labs., Inc., Princeton, NJ (USA)
DOE Contract Number:
NAS-7-100-954560
OSTI ID:
7294659
Report Number(s):
ERDA/JPL/954560-76/2; Aero-Chem(TN)-169
Country of Publication:
United States
Language:
English