Focused-ion-beam micromachining: a fabrication tool for prototypal semiconductor lasers

Technical Report · Wed Jul 01 00:00:00 EDT 1992

OSTI ID:7201500

DeFreez, R K

Focused-ion-beam micromachining is a technique for forming optical quality surfaces in semiconductor laser materials and has been used to fabricate several types of prototypal semiconductor laser structures. Diode laser output mirrors of quality comparable to that of cleaved facets have been fabricated. Focused-ion-beam micromachined (FIBM) single stripe coupled cavity lasers have demonstrated widely and continuously tunable single mode operation. Tunable single longitudinal mode optical power has been achieved with FIBM coupled cavity phase-locked arrays of AlGaAs semiconductor lasers. Hundreds of milliwatts of pulsed optical power has been observed from surface-emitting phase-locked arrays with FIBM turning and oscillator mirrors. The use of vector scanning of the ion beam to produce arbitrary surface contours, such as linear and curved turning mirrors and micron pitch gratings with various profiles, has been demonstrated.

• Research Organization: Oregon Graduate Inst. of Science and Technology, Beaverton, OR (United States)
• OSTI ID: 7201500
• Report Number(s): AD-P-007987/1/XAB
• Resource Relation: Other Information: This article is from 'Advanced Processing and Characterization Technologies. Fabrication and Characterization of Semiconductor Optoelectronic Devices and Integrated Circuits Held in Clearwater, Florida on 8-10 May 1991. American Vacuum Society Series 10,' AD-A254 162, p92-95
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
LASER MATERIALS
MACHINING
SEMICONDUCTOR LASERS
FABRICATION
ALUMINIUM ARSENIDES
CAVITIES
GALLIUM ARSENIDES
ION BEAMS
MIRRORS
OPERATION
OSCILLATORS
SURFACES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
ELECTRONIC EQUIPMENT
EQUIPMENT
GALLIUM COMPOUNDS
LASERS
MATERIALS
PNICTIDES
SEMICONDUCTOR DEVICES
SOLID STATE LASERS
426002* - Engineering- Lasers & Masers- (1990-)