Ion chemistry in SF/sub 6/ corona
Although SF/sub 6//sup -/ is known to be the major negative charge carrier initially produced by electron attachment, the subsequent ion chemistry of SF/sub 6/ corona is not completely established. Recent efforts to model the yield of the neutral by-product SOF/sub 4/ in SF/sub 6/ corona suggest that reactions of SF/sub 6//sup -/ with SOF/sub 4/ can be an important factor on the model. Reactions of SF/sub 6//sup -/, with various species that are either present initially in the gas or are produced by the corona and allowed to accumulate, result in the formation of stable product ions. To this end, negative ions produced by corona discharges in SF/sub 6/ have been studied by mass spectrometry in the pressure range 1.6-20 kPa (12-150 torr). 9 refs., 5 figs., 2 tabs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 7182643
- Report Number(s):
- CONF-880948-3; ON: DE88015297
- Resource Relation:
- Conference: 9. international conference on gas discharges and their applications, Venice, Italy, 19 Sep 1988; Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
Similar Records
Transfer of F/sup -/ in the reaction of SF/sup -/ with SOF/sub 4/: implications for SOF/sub 4/ production in corona discharges
Ion-molecule reactions in SF{sub 6} corona discharges and their potential relevance to plasma processing
Related Subjects
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
SULFUR FLUORIDES
CHEMICAL REACTIONS
CORONA DISCHARGES
ELECTRON ATTACHMENT
MASS SPECTROSCOPY
ELECTRIC DISCHARGES
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
SPECTROSCOPY
SULFUR COMPOUNDS
640304* - Atomic
Molecular & Chemical Physics- Collision Phenomena
400400 - Electrochemistry