Microfabrication processes for high-T sub c superconducting films

Journal Article · Fri Dec 01 00:00:00 EST 1989 · IEEE Transactions on Components, Hybrids, and Manufacturing Technology (Institute of Electrical and Electronics Engineers); (USA)

DOI:https://doi.org/10.1109/33.49014· OSTI ID:7051998

Tsuge, H; Matsui, S; Takado, N ^[1]

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1. NEC Corp., 34, Miyukigaoka, Tsukuba, Ibaraki (JP)

Microfabrication processes for Y-Ba-Cu-O films have been investigated, using ion-beam techniques. High-{Tc} superconducting lines as narrow as 0.8 {mu}m have been fabricated from epitaxial YBa{sub 2}Cu{sub 3}O{sub 7 {minus} {ital y}} films by Ar ion-beam etching (IBE), combined with focused ion-beam (FIB) lithography. The resulting lines, 1.3 {mu}m wide and 2 mm long, showed a zero resistance temperature of 81 K and a critical current density of 1.9 {times} 10{sup 4} A/cm{sup 2} at 77.3 K. Maskless etching was carried out using 130-keV au{sup +} focused ion-beam (FIB) with a 0.1-{mu}m-diameter beam. A 50-nm-thick film was patterned into 0.3-{mu}m-wide lines at a dose of 5 {times} {sup 16} ions/cm{sup 2}. In comparison with Ar IBE, Cl{sub 2} reactive ion-beam etching (RIBE) exhibited an enhancement effect in sputtering yield. Ion implantation with 300-keV Si{sup + +} FIB also indicated the possibility to produce submicrometer patterns by selectively modifying film properties from superconductive to normal or insulting.

• OSTI ID: 7051998
• Journal Information: IEEE Transactions on Components, Hybrids, and Manufacturing Technology (Institute of Electrical and Electronics Engineers); (USA), Vol. 12:4; ISSN 0148-6411
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
ION BEAMS
ETCHING
SUPERCONDUCTING FILMS
FABRICATION
ARGON
BARIUM OXIDES
COPPER OXIDES
HIGH-TC SUPERCONDUCTORS
SPUTTERING
SUPERCONDUCTIVITY
YTTRIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BEAMS
CHALCOGENIDES
COPPER COMPOUNDS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
FLUIDS
GASES
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
SUPERCONDUCTORS
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
426001* - Engineering- Superconducting Devices & Circuits- (1990-)
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
656100 - Condensed Matter Physics- Superconductivity