Effects of beam parameters on excimer laser deposition of YBa sub 2 Cu sub 3 O sub 7 minus. delta

Journal Article · Mon Feb 05 00:00:00 EST 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.103303· OSTI ID:7007900

Muenchausen, R E; Hubbard, K M; Foltyn, S; Estler, R C; Nogar, N S ^[1]; Jenkins, C ^[2]

---

1. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (US)
2. U.S. Military Academy, West Point, New York 10997 (USA)

Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis of the laser spot, plumes exhibited a cos{sup 3.5}({theta}) spread and composition varied with angle; in the perpendicular direction, more diffuse (cos{sup 1.5}({theta})) plume distributions were associated with stoichiometric deposition. The observed phenomena are consistent with formation of a Knudsen layer near the target surface.

• OSTI ID: 7007900
• Journal Information: Applied Physics Letters; (USA), Vol. 56:6; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
DEPOSITION
COPPER OXIDES
YTTRIUM OXIDES
EXCIMER LASERS
PHYSICAL RADIATION EFFECTS
STOICHIOMETRY
SUPERCONDUCTING FILMS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
FILMS
GAS LASERS
LASERS
OXIDES
OXYGEN COMPOUNDS
RADIATION EFFECTS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties
360206 - Ceramics
Cermets
& Refractories- Radiation Effects
656100 - Condensed Matter Physics- Superconductivity