Chemical vapor deposition of tantalum carbide/titanium carbide/aluminum oxide/titanium nitride multilayer coatings on cemented carbide cutting tools
Multi-layered TaC-TiC/Al/sub 2/O/sub 3//TiN coatings were deposited onto mixed cemented carbide (WC-Co-TiC-TaC) cutting tools using chemical vapor deposition in a large, commercial reactor. The variability of microstructure, deposition rate, machining performance, phases present, and adherence with position within the deposition reactor were studied for Al/sub 2/O/sub 3/ deposition temperatures of 915, 1000, and 1035/sup 0/C where coating layers were deposited separately in a discontinuous manner. A continuous deposition of TaC-TiC/Al/sub 2/O/sub 3/ with separate subsequent TiN overlayer deposition was studied also. X-ray diffraction of low-angle-taper sectioned coatings was used to selectively analyze coating and substrate phases present. Phases were similar for all the discontinuously coated inserts with TiN, Al/sub 2/O/sub 3/, TiC, and WC phases positively identified. Auger electron spectroscopy of taper sectioned coatings improved depth resolution by one to two orders of magnitude over conventional SEM/EDS of 90/sup 0/ sections. The interdiffusion between highly adherent coatings and coating/substrate pairs was low with metallic constituents exhibiting diffusion coefficients of the order of 10/sup -17/ cm/sup 2//sec.
- Research Organization:
- Rutgers-the State Univ., New Brunswick, NJ (USA)
- OSTI ID:
- 7004672
- Resource Relation:
- Other Information: Thesis (Ph. D.)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
CARBIDES
PROTECTIVE COATINGS
CUTTING TOOLS
CHEMICAL VAPOR DEPOSITION
ALUMINIUM OXIDES
MICROSTRUCTURE
PHASE STUDIES
TANTALUM CARBIDES
TITANIUM CARBIDES
TITANIUM NITRIDES
VERY HIGH TEMPERATURE
ALUMINIUM COMPOUNDS
CARBON COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COATINGS
CRYSTAL STRUCTURE
DEPOSITION
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SURFACE COATING
TANTALUM COMPOUNDS
TITANIUM COMPOUNDS
TOOLS
TRANSITION ELEMENT COMPOUNDS
360205* - Ceramics
Cermets
& Refractories- Corrosion & Erosion
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies