X-ray reflection from novel multilayers with variable smoothness and figure: Final technical report for the period 1 April 1984-15 May 1986

Technical Report · Mon Sep 01 00:00:00 EDT 1986

OSTI ID:7003400

Knight, L V; Thorne, J M

The theory of Bragg diffraction of soft x rays from thin-film multilayers has been refined and extended to include the effects of interfacial roughness and diffusion. This theory, together with a recently improved data base, has allowed the development of reliable design procedures for various multilayer applications. Different designs can emphasize peak reflectivity, high resolution, heat resistance, or other characteristics. Success has been achieved in the fabrication of heat-resistant multilayers and in producing controllably curved silicon substrates for multilayers.

• Research Organization: Brigham Young Univ., Provo, UT (USA)
• DOE Contract Number: AS08-84DP40199
• OSTI ID: 7003400
• Report Number(s): DOE/DP/40199-3; ON: DE87003907
• Resource Relation: Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
SOFT X RADIATION
BRAGG REFLECTION
X-RAY DIFFRACTION
INTERFACES
LAYERS
ROUGHNESS
THIN FILMS
COHERENT SCATTERING
DIFFRACTION
ELECTROMAGNETIC RADIATION
FILMS
IONIZING RADIATIONS
RADIATIONS
REFLECTION
SCATTERING
SURFACE PROPERTIES
X RADIATION
440101* - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments