In - situ patterned laser deposition of high- T sub c Y-Ba-Cu-O superconducting thin films

Journal Article · Sun Apr 01 00:00:00 EST 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.345332· OSTI ID:6978250

Singh, R K; Narayan, J; Singh, A K; Lee, C B ^[1]

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1. Department of Materials Science Department of Engineering, North Carolina State University, Raleigh, North Carolina 27695-7916 (USA)

Reliable critical current density measurements have been sucessfully carried out on superconducting thin films which were {ital in} {ital situ} patterned during the laser deposition process. This method does not require cumbersome wet etching or post-ion-implantation patterning steps for measuring transport critical current densities of thin films. Epitaxial films of YBa{sub 2}Cu{sub 3}O{sub 7} on (100) SrTiO{sub 3} and (100)yttria-stabilized ZrO{sub 2} (YSZ) were fabricated at low processing temperatures (500--650 {degree}C) by the excimer laser ablation technique in an oxygen ambient coupled with a dc bias voltage of +300 V on an interposing ring between the substrate and the target. Steel masks of various lateral dimensions were placed close to the substrate to generate various patterns. The superconducting properties obtained at the masked and unmasked areas of the film were similar and reproducible. The thickness and width of the mask have been found to be critical in controlling the superconducting properties of the patterned thin films. Excellent quality superconducting thin films were obtained in the patterned areas. The critical temperature of the films was found to lie in the range of 88--90 K, and the best critical current density values (at 77 K and zero magnetic field) of 1.0{times}10{sup 6}, 5.0{times}10{sup 6}, and 6.5{times}10{sup 6} A/cm{sup 2} were obtained for films deposited on (100) YSZ, (100) SrTiO{sub 3} , and (100) LaAlO{sub 3} , respectively.

• OSTI ID: 6978250
• Journal Information: Journal of Applied Physics; (USA), Vol. 67:7; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
EPITAXY
COPPER OXIDES
YTTRIUM OXIDES
ABLATION
CRITICAL CURRENT
DEPOSITION
LASER RADIATION
STRONTIUM COMPOUNDS
SUBSTRATES
SUPERCONDUCTING FILMS
TITANATES
TRANSITION TEMPERATURE
ZIRCONIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CURRENTS
ELECTRIC CURRENTS
ELECTROMAGNETIC RADIATION
FILMS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication