Sol-gel coating on acoustic wave devices: Thin film characterization and chemical sensor development
We have investigated the use of porous oxide coatings, formed using sol-gel chemistry routes, as the discriminating elements of acoustic wave (AW) chemical sensors. These coatings provide several unique advantages: durability, high adsorption capacity based on large surface areas, and chemical selectivity based on both molecular size and chemical interactions. The porosity of these coatings is determined by performing nitrogen adsorption isotherms using the AW device response to mass changes to monitor the uptake of nitrogen at 77 K. These studies demonstrate how sol-gel chemistry and film-forming technique can be used to tailor the microstructure of thin coatings. The chemical sensitivity and selectivity obtained with this class of coatings will be demonstrated using several examples: hydrous titanate ion exchange coatings, zeolite/silicate microcomposite coatings, and surface-modified silicate films. 18 refs., 4 figs., 2 tabs.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6884008
- Report Number(s):
- SAND-89-2802C; CONF-900466-56; ON: DE90012224
- Resource Relation:
- Journal Volume: 180; Conference: Spring meeting of the Materials Research Society, San Francisco, CA (USA), 16-21 Apr 1990
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
COATINGS
MICROSTRUCTURE
POROSITY
PROBES
SURFACE COATING
ACOUSTIC MEASUREMENTS
ION EXCHANGE MATERIALS
MEASURING INSTRUMENTS
NITROGEN
OXIDES
SILANES
SILICATES
SOL-GEL PROCESS
ZEOLITES
CHALCOGENIDES
CRYSTAL STRUCTURE
DEPOSITION
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
INORGANIC ION EXCHANGERS
MATERIALS
MINERALS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXYGEN COMPOUNDS
SILICON COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication