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Title: Amorphous and metastable phase formation in systems with positive heats of mixing using high-rate sputter deposition

Conference ·
OSTI ID:6825071

The triode sputtering technique and a ''split-target'' arrangement were used to produce metastable crystalline and amorphous phases in the Cu-W, Mo-Cu, Ag-Fe, Ag-Cu, Pu-Ta and Pu-V systems. These systems all exhibit solid immiscibility and have positive heats of mixing and atomic radii that differ by at least 10%. The sputtered coatings, whose thickness varied between 25 and 200 microns, were formed at deposition rates between 35 and 200 /angstrom//s. They were characterized using x-ray diffraction, TEM, microprobe, microhardness, and DSC techniques. The observed amorphous and metastable solid solution phases are discussed in terms of predicated heats of formation for these phases using Miedema's thermodynamic approximations (1) that include chemical, elastic, and structural contributions. Differences in compositional ranges observed by high rate sputter deposition compared to other vapor deposition techniques (e.g., coevaporation) appeared to arise as a result of processes that occur during deposition or immediately following deposition. 25 refs., 9 figs., 1 tab.

Research Organization:
Lawrence Livermore National Lab., CA (USA)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
6825071
Report Number(s):
UCRL-98878; CONF-881155-19; ON: DE89004043
Resource Relation:
Conference: Fall meeting of the Materials Research Society, Boston, MA, USA, 28 Nov 1988; Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English

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