Evacuation apparatus with cryogenic pump and trap assembly

Patent · Tue Jul 29 00:00:00 EDT 1980

OSTI ID:6821499

Mahl, G

An evacuation apparatus comprising a vessel defining a vacuum chamber therein, vacuumizing means communicating with an opening to said vacuum chamber for selectively drawing a vacuum therein comprising cryogenic pump means disposed closely adjacent to said opening and defined by substantial cryogenically cooled trap surfaces for freezing-out water vapor from air evacuated from said vacuum chamber, said opening being common to said vacuum chamber and to said cryogenic pump means, valve means for selectively opening or closing the opening to said vacuum chamber and movable from a first position within said cryogenic pump means closing said opening to a second position within said cryogenic pump means directly exposing said vacuum chamber to said cryogenic pump means, through said opening, baffle means disposed closely adjacent to the opening to said vacuum chamber for providing substantial open communication to said vacuum chamber and for substantially preventing ingress of contaminants into said vacuum chamber, said baffle means being positioned to provide an optically dense view of said opening when viewed from a downstream side of said baffle means, and a plurality of longitudinally spaced and cryogenically cooled fins mounted in nested relationship within said baffle means and disposed in out-of-contact relationship therewith, said fins being positioned to provide an optically dense view of the downstream side of said baffle means when viewed from said openings. The cryogenic pump is adapted for use in an evacuation apparatus comprising a housing defining an opening to a vacuum chamber, a plurality of metallic plates defining a first chamber therein communicating with said vacuum chamber through said opening and further defining a second chamber at least partially surrounding said first chamber and adapted to be at least partially filled with a cryogenic liqui.d

• Assignee: Cha Ind
• Patent Number(s): US 4214853
• Application Number: TRN: 81-000294
• OSTI ID: 6821499
• Resource Relation: Patent File Date: Filed date 15 May 1978
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CRYOPUMPS
DESIGN
VACUUM SYSTEMS
BAFFLES
CONTAINERS
COOLING
COPPER
DEPOSITION
DROPLETS
FILMS
FINS
FREEZING OUT
NITROGEN
OILS
OPENINGS
PISTONS
PLATES
SEALS
TRAPS
VALVES
VAPORS
WATER
CONTROL EQUIPMENT
ELEMENTS
EQUIPMENT
FLOW REGULATORS
FLUIDS
GASES
HYDROGEN COMPOUNDS
LABORATORY EQUIPMENT
METALS
NONMETALS
ORGANIC COMPOUNDS
OTHER ORGANIC COMPOUNDS
OXYGEN COMPOUNDS
PARTICLES
PUMPS
SEPARATION PROCESSES
TRANSITION ELEMENTS
VACUUM PUMPS
420700* - Engineering- Vacuum Engineering- (-1987)
420201 - Engineering- Cryogenic Equipment & Devices