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Title: Exploratory development of thin-film polycrystalline-silicon photovoltaic devices. Final technical report

Technical Report ·
DOI:https://doi.org/10.2172/6613042· OSTI ID:6613042

The overall ribbon-to-ribbon (RTR) process sequence may be divided into major steps; progress in each of them has contributed to advancement of the overall technology. The molybdenum sheets on which microcrystalline silicon thin films are deposited must be re-used many times for reasons of economy. Electropolishing was found to be an effective way of resurfacing the molybdenum for continued use. Deposition rate and efficiency of silicon microcrystalline films on molybdenum substrates were shown to be enhanced (over CVD) by utilizing a high pressure plasma (HPP). A microribbon deposition system was designed for continuous operation under microprocessor control. Acid etching to remove surface contamination layers from microcrystalline films before RTR was found to be more reproducible than plasma or hot alkali etching. Laser beam RTR (LB-RTR) growth station improvements have given more reliable operation, very clean ribbons, and larger grains. An electron beam RTR (EB-RTR) system was designed and partially completed. Preliminary results (under partial control) have produced thin films with properties comparable to LB-RTR ribbons. Characterization of RTR solar cell substrates has shown that the main barrier to efficiencies > 10 to 11% is high dislocation density (approx. 10/sup 6//cm/sup 2/).

Research Organization:
Motorola, Inc., Phoenix, AZ (USA)
DOE Contract Number:
AC02-77CH00178
OSTI ID:
6613042
Report Number(s):
SERI/TR-9100-1-T4; ON: DE83003859
Resource Relation:
Other Information: Portions of document are illegible. Printed copy available until stock is exhausted
Country of Publication:
United States
Language:
English