Multiple-species ion beams from titanium-hafnium alloy cathodes in vacuum arc plasmas
- Nippon Steel Corporation, Electronics Research Laboratories, 10-1 Fuchinobe 5-chome, Sagamihara Shi, Kanagawa 229 (Japan)
- Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)
We have studied the ion spectra of the plasma produced by the metal vapor vacuum arc for the case when the cathode material is a solid solution TiHf alloy of variable composition ratio. A vacuum arc ion source was used to generate an intense beam of metal ions and a time-of-flight ion charge-to-mass diagnostic was used to measure the beam ion species and charge state distributions. A range of different cathode compositions was examined, from pure Ti to pure Hf and with five different alloy mixes between these extremes. We find that the ratio of ion currents in the multiple-species ion beam corresponds approximately to the ratio of elements in the cathode, and that the mean charge states of the elemental ion components remain approximately constant as the cathode composition ratio is changed. Multispecies metal ion beams can readily be generated in this way and the ion species characteristics of the beam are predictable.
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 6499588
- Journal Information:
- Journal of Applied Physics; (United States), Vol. 73:11; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Ion spectra of vacuum arc plasma with compound and alloy cathodes
Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode
Related Subjects
GENERAL PHYSICS
Ta
36 MATERIALS SCIENCE
HAFNIUM ALLOYS
VACUUM EVAPORATION
ION SOURCES
SPECTRA
TITANIUM ALLOYS
BINARY ALLOY SYSTEMS
CATHODES
ELECTRIC ARCS
PLASMA
ALLOY SYSTEMS
ALLOYS
CURRENTS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRODES
EVAPORATION
PHASE TRANSFORMATIONS
661220* - Particle Beam Production & Handling
Targets- (1992-)
360104 - Metals & Alloys- Physical Properties