Microstructural characteristics of conductive SrRuO{sub 3} thin films formed by pulsed-laser deposition
- Department of Materials Science and Engineering, New Mexico Institute of Mining and Technology, Socorro, New Mexico 87801 (United States)
- Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
Transmission electron microscopy and high-resolution electron microscopy have been used to study microstructural properties of conductive SrRuO{sub 3} films grown by pulsed laser deposition on (001) LaAlO{sub 3} and (001) SrTiO{sub 3} substrates. It was found that the SrRuO{sub 3} films deposited on both substrates consist of mixed domains of [001] and [110] orientations, with orientation relationships that can be described as (i) (001){sub f}{parallel}(001){sub s} and [110]{sub f}{parallel}[100]{sub s} and (ii) (110){sub f}{parallel}(001){sub s} and [001]{sub f}{parallel}[100]{sub s}, respectively. The SrRuO{sub 3} films deposited on SrTiO{sub 3}, in particular, was found to have a layered domain structure, with the [110] domain grown initially on the substate, followed by growth of the [001] oriented domain with increasing thickness. The films on SrTiO{sub 3} are strained and have a coherent interface with the substrate. The SrRuO{sub 3} films deposited on LaAlO{sub 3}, on the other hand, contain a high density of structural defects such as stacking faults and microtwins on the (022) planes. Microtwins as large as 50nm in thickness are observed in the films deposited on LaAlO{sub 3}. Possible causes for the observed structural defects in the films are discussed. {copyright} {ital 1998 Materials Research Society.}
- OSTI ID:
- 641519
- Journal Information:
- Journal of Materials Research, Vol. 13, Issue 8; Other Information: PBD: Aug 1998
- Country of Publication:
- United States
- Language:
- English
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