Comparison of bulk- and surface-micromachined pressure sensors
Conference
·
OSTI ID:639758
- Sandia National Labs., Albuquerque, NM (United States)
- Motorola, Phoenix, AZ (United States)
Two piezoresistive micromachined pressure sensors were compared: a commercially available bulk-micromachined (BM) pressure sensor and an experimental surface-micromachined (SM) pressure sensor. While the SM parts had significantly smaller die sizes, they were outperformed in most areas by the BM parts. This was due primarily to the smaller piezoresistive gauge factor in the polysilicon piezoresistors in the SM parts compared to the single crystal strain gauge used in the BM parts.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 639758
- Report Number(s):
- SAND-98-1779C; CONF-980918-; ON: DE98007269; BR: DP0102022; TRN: AHC29816%%66
- Resource Relation:
- Conference: Micromachining and microfabrication symposium, Santa Clara, CA (United States), 21-22 Sep 1998; Other Information: PBD: [1998]
- Country of Publication:
- United States
- Language:
- English
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