Flexural plate wave resonator excited with Lorentz forces

Journal Article · Fri May 01 00:00:00 EDT 1998 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.367242· OSTI ID:627733

Martin, S J; Butler, M A; Spates, J J; Mitchell, M A; Schubert, W K ^[1]

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1. Microsensor Research and Development Department, Sandia National Laboratories, Albuquerque, New Mexico87185 (United States)

A flexural plate wave resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived which characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the device{close_quote}s response to changes in dc magnetic field strength, ambient gas composition, gas pressure, and input power. {copyright} {ital 1998 American Institute of Physics.}

• OSTI ID: 627733
• Journal Information: Journal of Applied Physics, Vol. 83, Issue 9; Other Information: PBD: May 1998
• Country of Publication: United States
• Language: English

Related Subjects

30 DIRECT ENERGY CONVERSION
LORENTZ FORCE
SILICON NITRIDES
DESIGN
MEMBRANES
PLATES
RESONATORS
EQUIVALENT CIRCUITS
PRESSURE MEASUREMENT
GASES