Radiation degradation behavior of chlorine-containing vinyl copolymers. Search for improved electron-beam resists
- Army Electronics Tech. and Devices Lab., Fort Monmouth, NJ
Vinyl copolymers with high radiation degradation sensitivity have been synthesized by copolymerizing vinylidene chloride (VDC), CH/sub 2/ = CCl/sub 2/, with methyl methacrylate (MMA), methacrylonitrile, methyl ..cap alpha..-chloroacrylate, and dimethyl itaconate using emulsion techniques. In addition, copolymers of methyl ..cap alpha..-chloroacrylate with methyl methacrylate and poly(..cap alpha..-chloroacrylonitrile) were studied. Introduction of vinylidene chloride into methyl methacrylate polymers caused a sharp increase in G/sub s/ even at relatively low VDC incorporation. Upon 29% VDC incorporation, the G/sub s/ value increased from 1.3 (homopolymer of MMA) to 3.4. G/sub s/ was found to be a linear function of copolymer content for several systems, but G/sub x/ was not. At higher VDC levels, the increase in G/sub s/ was countered by increases in G/sub x/. At lower VDC levels, G/sub x/ was suppressed below the values predicted by a linear G/sub x/ dependence on composition for such systems as VDC/MMA, MCA/MMA, and ..cap alpha..-chloroacrylonitrile/MMA. The VDC/MMA copolymer (29% VDC) gave a sensitivity of 4.0 x 10/sup -5/ C/cm/sup 2/ to electron beam exposure using the 0% unexposed resist thickness loss criterion and is 2 to 3 times more sensitive than PMMA. Poly(..cap alpha..-chloroacrylonitrile) is a negative resist with a sensitivity of 5 x 10/sup -5/ C/cm/sup 2/ using one-micron line images for testing.
- OSTI ID:
- 6197826
- Journal Information:
- Polym. Eng. Sci.; (United States), Vol. 20:9
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
ACRYLATES
CHEMICAL RADIATION EFFECTS
ACRYLONITRILE
CHLORINATED ALIPHATIC HYDROCARBONS
ESTERS
METHYL METHACRYLATE
ORGANIC CHLORINE COMPOUNDS
POLYVINYLS
ELECTRON BEAMS
EXPERIMENTAL DATA
GAMMA RADIATION
ITACONIC ACID
VINYLIDENE RADICALS
BEAMS
CARBOXYLIC ACID ESTERS
CARBOXYLIC ACID SALTS
CARBOXYLIC ACIDS
CHEMISTRY
DATA
DICARBOXYLIC ACIDS
ELECTROMAGNETIC RADIATION
HALOGENATED ALIPHATIC HYDROCARBONS
INFORMATION
IONIZING RADIATIONS
LEPTON BEAMS
METHACRYLIC ACID ESTERS
NITRILES
NUMERICAL DATA
ORGANIC ACIDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC POLYMERS
PARTICLE BEAMS
POLYMERS
RADIATION CHEMISTRY
RADIATION EFFECTS
RADIATIONS
RADICALS
400600* - Radiation Chemistry
360405 - Materials- Polymers & Plastics- Degradation & Erosion- (-1987)