Use of sol-gels in the application of ceramic oxide thin films. [Ba titanate; Li niobate; Li tantalate]

Technical Report · Sat Aug 01 00:00:00 EDT 1987

OSTI ID:6116313

Paulson, B A

Single components sols were characterized and used to make thin films on silicon wafers. The empirical equation, d = (2000 log(..mu..) + 350)(w)/sup -0.5/, was obtained, which adequately describes the thickness of the sintered films, independent of the ceramic oxide, solvent, concentration, sol age, and reaction conditions. The single component sols were used to make binary oxide sols - barium titanate, lithium niobate, and lithium tantalate. A barium solution can be added to the titania sol to produce a barium titanate compound of the desired composition, including Ba/sub 2/Ti/sub 9/O/sub 20/ and BaTi/sub 5/O/sub 11/. Mixing a lithium solution into either a niobia or a tantala sol yielded the desired compound along with a heavy metal oxide (either lithium niobate with niobium oxide or lithium tantalate with tantalum oxide). However, dissolving lithium methoxide with the ethoxide of niobium or tantalum in ethanol, prior to hyrolysis, did produce the desired binary oxide (lithium niobate or lithium tantalate) without any uncombined metal oxide. By altering the stoichiometric ratios of the constituent cations, different compounds were produced for dielectric characterization with an AC bridge circuit. In the case of the barium titanates, these calculated constants ranged from a high of 26.0 for TiO/sub 2/, to a low of 11.9 for BaTi/sub 5/O/sub 11/. The range for lithium tantalate was from a high of 21.6 for a stoichimetry of Li/sub 7/TaO/sub 6/, to a low at 8.4 for LiTaO/sub 3/. Lithium niobate ranged from a high at 21.1 for Nb/sub 2/O/sub 5/, to a low at 8.9 for Nb/sub 2/O/sub 5/ at a stoichimetry of Li/sub 2/Nb/sub 32/O/sub 81/.

• Research Organization: Ames Lab., IA (USA)
• DOE Contract Number: W-7405-ENG-82
• OSTI ID: 6116313
• Report Number(s): IS-T-1336; ON: DE87013610
• Resource Relation: Other Information: Thesis. Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM COMPOUNDS
DEPOSITION
LITHIUM COMPOUNDS
MICROELECTRONICS
THIN FILMS
NIOBATES
TANTALATES
TITANATES
GELS
SOLS
ALKALI METAL COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
COLLOIDS
DISPERSIONS
FILMS
NIOBIUM COMPOUNDS
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
TANTALUM COMPOUNDS
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360601* - Other Materials- Preparation & Manufacture