Ion bombardment effects on the near-surface composition during sputter profiling. [Cu-40 at. % Ni; Ni-9. 5 at. % Si]
The alteration of the near-surface composition that has often been observed in ion-bombarded alloys and compounds results from the interplay of several processes. In addition to displacement mixing leading to a randomization of atomic locations, and preferential loss of alloying elements by sputtering, which are dominant at relatively low temperatures, many thermally-activated processes, including radiation-enhanced diffusion, radiation-induced segregation and Gibbsian adsorption, also play important roles. The relative significance of each process in the evolution of the sputtered flux composition and of the compositional profile of the target depends on the type of alloys, temperature and ion characteristics. The number of systematic investigations of alloy sputtering that consider all of these processes and their potential interactions is rather limited. Purpose of this paper is to characterize the processes in simple physical terms and to point out under what conditions they may become important for compositional changes in near-surface regions of sputter alloys. Selected results of recent model calculations and experimental studies will be presented to indicate the effects to be expected. 63 refs., 15 figs.
- Research Organization:
- Argonne National Lab., IL (USA)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 5848979
- Report Number(s):
- CONF-8710213-1; ON: DE88003087
- Resource Relation:
- Conference: European conference on applications of surface and interface analysis, Fellbach, F.R. Germany, 19 Oct 1987; Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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Ion-bombardment-induced subsurface composition modifications in alloys at elevated temperatures. [Cu - 40 at. % Ni]
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
COPPER ALLOYS
PHYSICAL RADIATION EFFECTS
SPUTTERING
NICKEL BASE ALLOYS
SILICON ALLOYS
SURFACES
ION COLLISIONS
ADSORPTION
AUGER EFFECT
CRYSTAL LATTICES
DIFFUSION
EQUATIONS
ION BEAMS
LAYERS
REACTION KINETICS
SEGREGATION
SPATIAL DISTRIBUTION
TEMPERATURE DEPENDENCE
VACANCIES
ALLOYS
BEAMS
COLLISIONS
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DISTRIBUTION
KINETICS
NICKEL ALLOYS
POINT DEFECTS
RADIATION EFFECTS
SORPTION
360106* - Metals & Alloys- Radiation Effects
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)