Low-temperature reactive-sputter deposition of vanadium oxide

Technical Report · Sat Jun 01 00:00:00 EDT 1985

OSTI ID:5819946

Hansen, S D; Aita, C R

Several oxides of vanadium (VO, V/sub 2/O/sub 3/, VO/sub 2/, V/sub 3/O/sub 5/, V/sub 6/O/sub 13/, V/sub 2/O/sub 5/) undergo a transition from metal to a semiconductor or insulator phase at a critical temperature. The change in crystal structure is accompanied by a large change in electrical and optical behavior. Therefore, these oxides have potential use, particularly in thin-film form, for a wide variety of applications involving thermally activated electronic or optical-switching devices. In this study, vanadium oxide films were grown on water-cooled sapphire, silicon, and glass substrates by reactive sputter deposition using a vanadium target and rf-excited argon discharges containing 0%-25% oxygen. Optical-emission spectroscopy was used for in-situ discharge diagnostics. Films were characterized by x-ray diffraction to determine crystallography and by double-beam spectrophotometry to determine optical absorption behavior in the 200-1200 nm spectral region. The results show that film crystallography evolves from single (110) orientation body-centered cubic vanadium to single (001) orientation orthorhombic vanadium pentoxide to a material in which there is no long-range atomic order detectable by x-ray diffraction as the sputtering gas oxygen content is increased. Changes in optical-absorption behavior that accompany the decrease in atomic order are presented and discussed.

• Research Organization: Wisconsin Univ., Milwaukee (USA)
• OSTI ID: 5819946
• Report Number(s): AD-A-165476/3/XAB
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
VANADIUM
SPUTTERING
VANADIUM OXIDES
DEPOSITION
ELECTRICAL PROPERTIES
ABSORPTION
CRITICAL TEMPERATURE
CRYSTAL GROWTH
CRYSTAL STRUCTURE
EMISSION SPECTROSCOPY
GLASS
OPTICAL PROPERTIES
SAPPHIRE
SILICON
SPECTROPHOTOMETRY
SUBSTRATES
THIN FILMS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
CORUNDUM
ELEMENTS
FILMS
METALS
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SPECTROSCOPY
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSITION TEMPERATURE
VANADIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties
360106 - Metals & Alloys- Radiation Effects