High resolution continuous wave laser induced fluorescence spectroscopy of sputtered Zr atoms
High resolution laser induced fluorescence (LIF) spectroscopy utilizing a continuous wave ring dye laser was used to measure the velocity distribution of sputtered Zr atoms. The ring dye laser permitted the determination of the sputtered Zr atom velocity distribution with a resolution of 2.4 x 10/sup 3/ cm/s over the emission range of 0 to 2 x 10/sup 6/ cm/s. The sputtered Zr atoms were produced by bombardment of the metal target by normally incident 3 keV Kr/sup +/. Determination of the velocity distributions was accomplished by tuning the exciting laser frequency through the Doppler shifted absorption frequencies of the sputtered atoms. It was determined that such processes as laser power density and transit time broadening of the sputtered atom's energy levels, the laser pulse duration and bandwidth as well as the geometry of the fluorescence excitation and detection system were all critical parameters important to the understanding of the experimental LIF velocity distributions. A comparison is also made between the use of cw and pulsed laser sources to excite the LIF emission. The measured velocity distributions were found to be in good agreement with previously proposed theoretical distributions based on the linear collision cascade model of sputtering.
- Research Organization:
- Chemistry Division, Argonne National Laboratory, Argonne, Illinois 60439
- DOE Contract Number:
- 31-104-ENG-38
- OSTI ID:
- 5651845
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Vol. 20:3
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
GENERAL PHYSICS
KRYPTON IONS
COLLISIONS
ZIRCONIUM
FLUORESCENCE SPECTROSCOPY
LASER SPECTROSCOPY
SPUTTERING
VELOCITY
DOPPLER EFFECT
DYE LASERS
ION BEAMS
KEV RANGE 01-10
RESOLUTION
SPECTRAL SHIFT
BEAMS
CHARGED PARTICLES
ELEMENTS
EMISSION SPECTROSCOPY
ENERGY RANGE
IONS
KEV RANGE
LASERS
LIQUID LASERS
METALS
SPECTROSCOPY
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions