Density measurements of excited components in a longitudinal discharge excimer laser

Journal Article · Tue Jun 01 00:00:00 EDT 1993 · IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/3.234403· OSTI ID:5614692

Furuhasi, H ^[1]; Ichikawa, M; Fuwa, E; Goto, T ^[2]

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1. Aichi Institute of Tech., Toyota (Japan)
2. Nagoya Univ., Nagoya (Japan). Dept. of Information Electronics

Time-dependent particle number densities of the excited components (Xe[sup +*], He[sup *]) in a longitudinal discharge XeCl excimer laser were measured by the laser absorption probing with a CW dye laser. The densities were compared with those in transversal discharge XeCl excimer lasers. The formation dynamics of the XeCl excimer molecules, excited atoms, and excited ions were discussed. The dependence of the particle number densities of the Xe[sup +*] ions on the buffer gas pressure, the Xe gas pressure, and the HCl gas pressure was investigated.

• OSTI ID: 5614692
• Journal Information: IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States), Vol. 29:6; ISSN 0018-9197
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
EXCIMER LASERS
ION DENSITY
DYNAMICS
ELECTRICAL PUMPING
TIME DEPENDENCE
XENON CHLORIDES
XENON IONS
CHARGED PARTICLES
CHLORIDES
CHLORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
IONS
LASERS
MECHANICS
PUMPING
RARE GAS COMPOUNDS
XENON COMPOUNDS
426002* - Engineering- Lasers & Masers- (1990-)