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Title: The {open_quotes}Micromorph{close_quotes} cell: a new way to high-efficiency-low-temperature crystalline silicon thin-film cell manufacturing?

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.52847· OSTI ID:552833
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  1. Institut de Microtechnique, A.-L. Breguet 2, Universite de Neuchatel, CH-2000 Neuchatel (Switzerland)
  2. University of Konstanz, D-78434 Konstanz (Germany)

Hydrogenated microcrystalline Silicon ({mu}c-Si:H) produced by the VHF-GD (Very High Frequency Glow Discharge) process can be considered to be a new base material for thin-film crystalline silicon solar cells. The most striking feature of such cells, in contrast to conventional amorphous silicon technology, is their stability under light-soaking. With respect to crystalline silicon technology, their most striking advantage is their low process temperature (220{degree}C). The so called {open_quotes}micromorph{close_quotes} cell contains such a {mu}c-Si:H based cell as bottom cell, whereas the top-cell consists of amorphous silicon. A stable efficiency of 10.7{percent} (confirmed by ISE Freiburg) is reported in this paper. At present, all solar cell concepts based on thin-film crystalline silicon have a common problem to overcome: namely, too long manufacturing times. In order to help in solving this problem for the particular case of plasma-deposited {mu}c-Si:H, results on combined argon/hydrogen dilution of the feedgas (silane) are presented. It is shown that rates as high as 9.4 {Angstrom}/s can be obtained: furthermore, a first solar cell deposited with 8.7 {Angstrom}/s resulted in an efficiency of 3.1{percent}. {copyright} {ital 1997 American Institute of Physics.}

OSTI ID:
552833
Report Number(s):
CONF-961178-; ISSN 0094-243X; TRN: 9722M0025
Journal Information:
AIP Conference Proceedings, Vol. 394, Issue 1; Conference: National Renewable Energy Laboratory (NREL)/Sandia National Laboratories (SNL) photovoltaics program review meeting, Lakewood, CO (United States), 18-22 Nov 1996; Other Information: PBD: Feb 1997
Country of Publication:
United States
Language:
English