High-energy electron distribution in electron beam excited Ar/Kr and Ne/Xe mixtures
The electron energy distribution in electron beam (e beam) excited Ar/Kr and Ne/Xe gas mixtures is examined in detail. The binary rare-gas mixtures are similar to those used in excimer lasers. Cooling processes for the secondary electrons generated in the gas mixture plasma by the e beam are calculated using a reduced Boltzmann equation in which elastic and electron-electron collisions for electron energy distributions above the first excitation threshold of the rare gas are ignored. During the calculations for the Ar/Kr and Ne/Xe mixtures, all electron-related reactions and the interaction between the two different rare gases in the mixture are simultaneously considered. The high-energy secondary electrons produce a steady-state distribution within a very short time; however, it is found that the distribution is not Maxwellian. W values (eV/electron-ion pair) and yields of rare-gas excited states calculated from the steady-state high-energy electron distribution show a dependence on the mixture composition, especially for mixtures with low concentrations of the minor rare gas. This implies that the practice in excimer kinetics models of using the W values determined from pure rare gases is not entirely accurate.
- Research Organization:
- Spectra Technology, Inc., 2755 Northup Way, Bellevue, Washington 98004-1495
- OSTI ID:
- 5386154
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 63:9
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ARGON
ELECTRON BEAM PUMPING
ELECTRON-ATOM COLLISIONS
EXCIMER LASERS
KINETICS
KRYPTON
NEON
XENON
ENERGY SPECTRA
EXCITATION
THEORETICAL DATA
ATOM COLLISIONS
COLLISIONS
DATA
ELECTRICAL PUMPING
ELECTRON COLLISIONS
ELEMENTS
ENERGY-LEVEL TRANSITIONS
FLUIDS
GAS LASERS
GASES
INFORMATION
LASERS
NONMETALS
NUMERICAL DATA
PUMPING
RARE GASES
SPECTRA
420300* - Engineering- Lasers- (-1989)