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Title: A new transparent conducting oxide in the Ga{sub 2}O{sub 3}{endash}In{sub 2}O{sub 3}{endash}SnO{sub 2} system

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.118676· OSTI ID:526486
;  [1]; ;  [2]
  1. Department of Materials Science and Engineering and Materials Research Center, Northwestern University, Evanston, Illinois 60208 (United States)
  2. Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208 (United States)

A new transparent conducting oxide (TCO), which can be expressed as Ga{sub 3{minus}x}In{sub 5+x}Sn{sub 2}O{sub 16}; 0.2{le}x{le}1.6, has been identified. The equilibrium phase relationships of this new material with respect to three other TCOs in Ga{sub 2}O{sub 3}{endash}In{sub 2}O{sub 3}{endash}SnO{sub 2} are reported. The optical properties of this phase are slightly superior to Sn-doped indium oxide (ITO) and depend on composition. A room-temperature conductivity of 375 {Omega}cm{sup {minus}1} was obtained for H{sub 2}-reduced Ga{sub 2.4}In{sub 5.6}Sn{sub 2}O{sub 16}. This value is an order of magnitude lower than commercial ITO films, but comparable to values reported for bulk, polycrystalline Sn-doped In{sub 2}O{sub 3}. {copyright} {ital 1997 American Institute of Physics.}

OSTI ID:
526486
Journal Information:
Applied Physics Letters, Vol. 70, Issue 13; Other Information: PBD: Mar 1997
Country of Publication:
United States
Language:
English

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